Low-Temperature Route to Direct Amorphous to Rutile Crystallization of TiO2 Thin Films Grown by Atomic Layer Deposition
J Saari, H Ali-Löytty, K Lahtonen… - The Journal of …, 2022 - ACS Publications
The physicochemical properties of titanium dioxide (TiO2) depend strongly on the crystal
structure. Compared to anatase, rutile TiO2 has a smaller bandgap, a higher dielectric …
structure. Compared to anatase, rutile TiO2 has a smaller bandgap, a higher dielectric …
A systematical investigation of layer growth rate, impurity level and morphology evolution in TiO2 thin films grown by ALD between 100 and 300° C
B Xia, JJ Ganem, E Briand, S Steydli… - Vacuum, 2023 - Elsevier
TiO 2 thin films prepared by atomic layer deposition (ALD) have attracted great attention due
to the widespread application of the oxide as a promising charge storage material for lithium …
to the widespread application of the oxide as a promising charge storage material for lithium …
A theoretical study on the surface reaction of tetrakis (dimethylamino) titanium on titanium oxide
Tetrakis (dimethylamino)-titanium (TDMAT, Ti (NMe2) 4) has been used for the low-
temperature atomic layer deposition (ALD) process of titanium oxide (TiO2) films. In this …
temperature atomic layer deposition (ALD) process of titanium oxide (TiO2) films. In this …
Temperature‐Dependent Properties of Atomic Layer Deposition‐Grown TiO2 Thin Films
NK Chowdhary, T Gougousi - Advanced Materials Interfaces, 2025 - Wiley Online Library
This study investigates the presence of titanium oxynitride bonds in titanium dioxide (TiO2)
thin films grown by atomic layer deposition (ALD) using tetrakis dimethyl amino titanium …
thin films grown by atomic layer deposition (ALD) using tetrakis dimethyl amino titanium …
Investigating the Properties of Transition Metal-Based Thin Films
NK Chowdhary - 2024 - search.proquest.com
Transition metal-based thin films, including oxides and nitrides, are widely studied due to
their diverse properties and applications. Among these materials, transition metal oxides …
their diverse properties and applications. Among these materials, transition metal oxides …
CROISSANCE D'UN FILM ALD D'Al2O3 ÉTUDIÉE PAR ANALYSE DU FAISCEAU D'IONS (IBA) ET SPECTROSCOPIE PHOTOÉLECTRONIQUE À RAYONS X: VERS …
B Xia, JJ Ganem, E Briand, S Steydli… - Lège Cap …, 2024 - secure.key4events.com
Les films minces d'Al2O3 obtenus par dépôt de couches atomiques (ALD) ont suscité
beaucoup d'intérêt en raison de leurs applications dans les dispositifs électroniques et les …
beaucoup d'intérêt en raison de leurs applications dans les dispositifs électroniques et les …