MN Kham, HAW El Mubarek, JM Bonar… - Applied Physics …, 2005 - pubs.aip.org
This letter reports a point defect injection study of 185 keV 2.3× 10 15 cm− 2 fluorine
implanted silicon. After an inert anneal at 1000 C, fluorine peaks are seen at depths of 0.3 …