K Zhao, P Li, D Li, L Lu, F Wang, Y Gao… - ACS Applied Electronic …, 2024 - ACS Publications
This paper presents the use of electrohydrodynamic jet (E-jet) printing technology for fabricating PZT thick film microstructures directly on substrate surfaces. The resolution of a …
J Li, W Ren, C Wang, M Liu, G Fan - Ceramics International, 2015 - Elsevier
Abstract Micro-pattern of 8.2-μm-thick PZT films was prepared on Pt/Ti/SiO 2/Si (1 0 0) substrate wafer by combining composite sol–gel and a novel lift-off using ZnO as a sacrificial …
AJ Welsh, RHT Wilke, MA Hickner… - Journal of the …, 2013 - Wiley Online Library
The ability to pattern piezoelectric thin films without damage is crucial for the development of microelectromechanical systems. Direct patterning of complex oxides through microcontact …
J Li, C Wang, J Ma, M Liu - Microsystem technologies, 2013 - Springer
The design, fabrication and measuring of piezoelectric micromachined ultrasonic transducers (pMUTs), including the deposition and patterning of PZT films, was investigated …
Z Wang, X Chen, K Huang, Y Zhang, B Xie… - Journal of Alloys and …, 2019 - Elsevier
In this paper, a fabrication method for a patterned (Ba 0.67 Sr 0.33 TiO 3, BST/LaNiO 3, LNO) n thin-film multilayer is reported. The multilayer films were deposited by radio …
RH Liang, D Remiens, D Deresmes, C Soyer… - Journal of Applied …, 2009 - pubs.aip.org
Lead zirconic titanate (PZT) microscale island (1 μ m–100 nm) was fabricated by focused ion beam before its crystallization, followed by the annealing treatment at the crystallization …
RH Liang, D Remiens, C Soyer, N Sama… - Microelectronic …, 2008 - Elsevier
The ion beam etching (IBE) process was performed on the amorphous PZT film which is deposited on the LNO coated SiO2/Si substrate, followed by the annealing step at the …
Dimensional size reduction has been the cornerstone of the exponential improvement in silicon based logic devices for decades. However, fundamental limits in the device physics …
A Ferri, D Remiens, R Desfeux, A Da Costa… - FIB Nanostructures, 2013 - Springer
The impact of Ga+-focused ion beam (FIB) about functional properties of continuous and nanostructured piezoelectric thin films of lead zirconate titanate (Pb (Zr x Ti 1-x) O 3) was …