Microfabrication of piezoelectric MEMS

J Baborowski - Journal of Electroceramics, 2004 - Springer
In this paper we present an overview of processes for fabrication of piezoelectric thin film
devices using PZT (Pb (Zr x Ti 1− x) O 3) in planar structures. These structures are used in …

Fabrication and Characterization of PZT Thick Film Microstructure and T-Shaped Generator by Electrohydrodynamic Jet Printing

K Zhao, P Li, D Li, L Lu, F Wang, Y Gao… - ACS Applied Electronic …, 2024 - ACS Publications
This paper presents the use of electrohydrodynamic jet (E-jet) printing technology for
fabricating PZT thick film microstructures directly on substrate surfaces. The resolution of a …

Micro-patterning of PZT thick film by lift-off using ZnO as a sacrificial layer

J Li, W Ren, C Wang, M Liu, G Fan - Ceramics International, 2015 - Elsevier
Abstract Micro-pattern of 8.2-μm-thick PZT films was prepared on Pt/Ti/SiO 2/Si (1 0 0)
substrate wafer by combining composite sol–gel and a novel lift-off using ZnO as a sacrificial …

Low‐cost, damage‐free patterning of lead zirconate titanate films

AJ Welsh, RHT Wilke, MA Hickner… - Journal of the …, 2013 - Wiley Online Library
The ability to pattern piezoelectric thin films without damage is crucial for the development of
microelectromechanical systems. Direct patterning of complex oxides through microcontact …

Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films

J Li, C Wang, J Ma, M Liu - Microsystem technologies, 2013 - Springer
The design, fabrication and measuring of piezoelectric micromachined ultrasonic
transducers (pMUTs), including the deposition and patterning of PZT films, was investigated …

High-quality patterning technique for polarization-enhanced (Ba0. 67Sr0. 33TiO3/LaNiO3) n multi-interface multilayer hetero-structure

Z Wang, X Chen, K Huang, Y Zhang, B Xie… - Journal of Alloys and …, 2019 - Elsevier
In this paper, a fabrication method for a patterned (Ba 0.67 Sr 0.33 TiO 3, BST/LaNiO 3,
LNO) n thin-film multilayer is reported. The multilayer films were deposited by radio …

Enhancement in nanoscale electrical properties of lead zirconic titanate island fabricated by focused ion beam

RH Liang, D Remiens, D Deresmes, C Soyer… - Journal of Applied …, 2009 - pubs.aip.org
Lead zirconic titanate (PZT) microscale island (1 μ m–100 nm) was fabricated by focused ion
beam before its crystallization, followed by the annealing treatment at the crystallization …

Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

RH Liang, D Remiens, C Soyer, N Sama… - Microelectronic …, 2008 - Elsevier
The ion beam etching (IBE) process was performed on the amorphous PZT film which is
deposited on the LNO coated SiO2/Si substrate, followed by the annealing step at the …

Dimensional Scaling of Perovskite Ferroelectric Thin Films

RR Keech - 2016 - etda.libraries.psu.edu
Dimensional size reduction has been the cornerstone of the exponential improvement in
silicon based logic devices for decades. However, fundamental limits in the device physics …

Evaluation of Damages Induced by Ga+-Focused Ion Beam in Piezoelectric Nanostructures

A Ferri, D Remiens, R Desfeux, A Da Costa… - FIB Nanostructures, 2013 - Springer
The impact of Ga+-focused ion beam (FIB) about functional properties of continuous and
nanostructured piezoelectric thin films of lead zirconate titanate (Pb (Zr x Ti 1-x) O 3) was …