Stress in thin films and coatings: Current status, challenges, and prospects

G Abadias, E Chason, J Keckes… - Journal of Vacuum …, 2018 - pubs.aip.org
The issue of stress in thin films and functional coatings is a persistent problem in materials
science and technology that has congregated many efforts, both from experimental and …

Correlation between the spin Hall angle and the structural phases of early 5d transition metals

J Liu, T Ohkubo, S Mitani, K Hono… - Applied Physics Letters, 2015 - pubs.aip.org
We have studied the relationship between the structure and the spin Hall angle of the early
5d transition metals in X/CoFeB/MgO (X= Hf, Ta, W, and Re) heterostructures. Spin Hall …

Interfacial Thermal Conductance between Cu and Diamond with Interconnected W−W2C Interlayer

Y Zhang, Z Wang, N Li, Z Che, X Liu… - … Applied Materials & …, 2022 - ACS Publications
Manipulating the interfacial structure is vital to enhancing the interfacial thermal
conductance (G) in Cu/diamond composites for promising thermal management …

Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films

D Choi, B Wang, S Chung, X Liu, A Darbal… - Journal of Vacuum …, 2011 - pubs.aip.org
Sputter-deposited W films with nominal thicknesses between 5 and 180 nm were prepared
by varying the base pressure prior to film deposition and by including or not including …

Unravelling oxygen driven α to β phase transformation in tungsten

A Chattaraj, M Balal, AK Yadav, SR Barman… - Scientific Reports, 2020 - nature.com
Thin films of β-W are the most interesting for manipulating magnetic moments using spin–
orbit torques, and a clear understanding of α to β phase transition in W by doping impurity …

β-phase tungsten nanorod formation by oblique-angle sputter deposition

T Karabacak, A Mallikarjunan, JP Singh, D Ye… - Applied physics …, 2003 - pubs.aip.org
We report the creation of an unusual simple cubic-phase W100 nanorods with a pyramidal
tip having four 110 facets using an oblique-angle sputter deposition technique with substrate …

Dependence of spin pumping in W/CoFeB heterostructures on the structural phase of tungsten

D Jhajhria, N Behera, DK Pandya, S Chaudhary - Physical Review B, 2019 - APS
We report the systematic dependence of spin pumping in tungsten (W)/CoFeB
heterostructures on the structural phase of W, which is intricately related to argon gas …

[HTML][HTML] Role of magnetic field and bias configuration on hipims deposition of w films

D Vavassori, F Mirani, F Gatti, D Dellasega… - Surface and Coatings …, 2023 - Elsevier
In this work, the deposition of tungsten (W) films by High Power Impulse Magnetron
Sputtering (HiPIMS) has been investigated. By adopting a combined modeling and …

On the potential of tungsten as next-generation semiconductor interconnects

D Choi, K Barmak - Electronic Materials Letters, 2017 - Springer
The continuous scaling of copper (Cu) interconnects produced two major shortcomings–a
severe resistivity size effect and material reliability issues. Tungsten (W), with the expected …

Tungsten and cobalt metallization: A material study for MOL local interconnects

V Kamineni, M Raymond, S Siddiqui… - 2016 IEEE …, 2016 - ieeexplore.ieee.org
Middle-of-the-line (MOL) interconnect and contact resistances represent significant impacts
to high-end IC performance at≤ 10 nm nodes. CVD W-based metallization has been used …