Effect of magnetic field on the formation of Cu nanoparticles during magnetron sputtering in the gas aggregation cluster source

M Vaidulych, J Hanuš, J Kousal… - Plasma Processes …, 2019 - Wiley Online Library
Reliable production of nanoparticles (NPs) by magnetron sputtering in a gas aggregation
source (GAS) is of great interest because of many potential applications. The size, shape, or …

Effect of oxygen concentration and system geometry on the current–voltage relations during reactive sputter deposition of titanium dioxide thin films

JC Sagás, DA Duarte, SF Fissmer - Vacuum, 2011 - Elsevier
Current–voltage relations at different magnetron sputtering systems and gas mixtures were
studied during reactive sputter deposition of titanium dioxide thin films. The main goal of this …

磁场对电晕放电极间区域的影响

米俊锋, 詹小平, 杜胜男, 董美 - 辽宁石油化工大学学报, 2013 - journal.lnpu.edu.cn
磁场对电晕放电极间区域的影响 Page 1 第33卷第3期暋暋暋暋暋暋暋暋辽 宁 石 油 化 工 大 学
学 报暋暋暋暋暋暋暋Vol.33暋No.3 2013年9月 JOURNALOFLIAONINGSHIHUA UNIVERSITY …

Experimental study of the effects of magnetic field intensity on Trichel pulses

D Zhou, J Tang, L Wei, C Zhang… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
In this paper, we investigated how magnetic field influenced Trichel discharges by
performing a statistical analysis of the current amplitude and pulse interval of Trichel …

Cathode unit of magnetron sputter for high target utilization

JS Park, LS Park, YS Lee, WG Lee… - Molecular Crystals and …, 2009 - Taylor & Francis
Magnetron sputtering has become one of most useful methods for depositing thin films.
However this coating technique has low target utilization and target life time. In this paper a …

Descargas Luminescentes Anómalas com Cátodo Magnetrão–Descargas Reactivas

AJML do Valle - 2009 - search.proquest.com
O trabalho que se descreve inseriu-se na continuidade do estudo das descargas
luminescentes anómalas em cátodos com assistência de campo magnético, desenvolvido …

[引用][C] 热处理温度对钼靶材微观组织和性能的影响

张国君, 马杰, 安耿, 孙院军 - 中国钼业, 2014

[引用][C] 气流和外加磁场对负电晕放电特性的影响

张泽力, 孙树伟, 陈佳尧, 钟方川 - 核聚变与等离子体物理, 2023