Due to their high isolation, low insertion loss, high linearity, and low power consumption,
microelectromechanical systems (MEMS) switches have drawn much attention from …

Currently, the technology of microelectromechanical systems is widely used in the
development of high-frequency and ultrahigh-frequency devices. The most important …

In this paper, we have designed, simulated, fabricated, and characterized a clamped-
clamped micro mechanical structure-based shunt capacitive RF MEMS switch. The clamped …

In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …

This paper presents a comprehensive investigation for the dielectric charging problem in
electrostatically actuated microelectromechanical system (MEMS) devices. The approach is …

The movement or migration of charges in dielectric materials like silicon oxide, silicon nitride
and glass, is recognized as one of the most significant causes of drift instability of MEMS …

This work presents a novel characterization methodology for the dielectric charging
phenomenon in electrostatically driven MEMS devices using Kelvin probe force microscopy …

The present paper investigates the effect of temperature on the charging process in
dielectric films of MEMS capacitive switches. The investigation includes the assessment of …

The dependence of the electrical properties of silicon nitride, which is a commonly used
dielectric in nano-and micro-electromechanical systems (NEMS and MEMS), on the …

The characterization of RF MEMS capacitive switch is presented to understand dielectric
charging, failure mode, and hold-down lifetime. The characterization included the …