A review of thermal processing in the subsecond range: semiconductors and beyond
L Rebohle, S Prucnal, W Skorupa - Semiconductor Science and …, 2016 - iopscience.iop.org
Thermal processing in the subsecond range comprises modern, non-equilibrium annealing
techniques which allow various material modifications at the surface without affecting the …
techniques which allow various material modifications at the surface without affecting the …
Millisecond thermal processing using flash lamps for the advancement of thin layers and functional coatings
W Skorupa, T Schumann, L Rebohle - Surface and Coatings Technology, 2017 - Elsevier
Thermal processing in the millisecond range provides advanced, non-equilibrium annealing
techniques which allow dedicated material modifications at the surface without affecting the …
techniques which allow dedicated material modifications at the surface without affecting the …
Communication—CMOS thin-film transistors via Xe flash-lamp crystallization of patterned amorphous Si
T Mudgal, K Bhadrachalam, P Bischoff… - ECS Journal of Solid …, 2017 - iopscience.iop.org
Flash-lamp annealing (FLA) has been investigated for crystallization of patterned
amorphous silicon (a-Si) in the fabrication of NMOS and PMOS Thin-Film Transistors (TFTs) …
amorphous silicon (a-Si) in the fabrication of NMOS and PMOS Thin-Film Transistors (TFTs) …
Application of flash lamp annealing on nitrogen-doped amorphous indium-gallium-zinc-oxide thin film transistors
Y Kim, J Kim, B Kim, HJ Kim, S Kim… - ECS Journal of Solid …, 2017 - iopscience.iop.org
Amorphous nitrogenated indium-gallium-zinc oxide (a-IGZO: N) thin films were deposited on
highly doped silicon (n+ Si) wafer substrates and heat-treated by millisecond flash lamp …
highly doped silicon (n+ Si) wafer substrates and heat-treated by millisecond flash lamp …
Semiconductor Applications
L Rebohle, S Prucnal, D Reichel, S Prucnal… - Flash Lamp Annealing …, 2019 - Springer
This chapter gives an overview where flash lamp annealing is used in semiconductor
applications. After a short introduction to defect engineering several use cases in the field of …
applications. After a short introduction to defect engineering several use cases in the field of …
Untersuchungen zum Einsatz des ms-Blitzlampentemperns bei der Atomlagenabscheidung von dünnen Schichten und für die Rekristallisation von amorphem …
T Henke - 2021 - tud.qucosa.de
Abstract (DE) Die Fertigung zukünftiger integrierter Schaltkreise und von Produkten des
Bereichs Konsumerelektronik erfordert die Anwendung von Verfahren mit reduzierter …
Bereichs Konsumerelektronik erfordert die Anwendung von Verfahren mit reduzierter …
Process Management
L Rebohle, S Prucnal, D Reichel, L Rebohle… - Flash Lamp Annealing …, 2019 - Springer
This chapter discusses a couple of issues which are relevant for process management.
Thereby, the main focus is on temperature measurement and temperature simulation. The …
Thereby, the main focus is on temperature measurement and temperature simulation. The …