With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

Perfectly matched layer has been used for solving anchor‐loss limited quality factor in the
Micro electromechanical systems. However, setting up a well‐behaved perfectly matched …

In this paper, Thickness-Lamé (TL) mode piezoelectrically-transduced silicon resonators are
studied and demonstrated. It will be shown that unlike Planar-Lamé resonance modes …

Owning a superior quality factor (Q) helps contribute to the advantages of
microelectromechanical systems (MEMS) resonators due to its impact on the performance of …

In this article, the microfluidic channels that deliver liquid to a microscale thin-film
piezoelectric-onsilicon (TPoS) gravimetric resonant sensor are incorporated into the …

Due to the small size and ability to supply energy to remote devices, metal-oxide-based
piezoelectric energy harvesters have recently gained an enormous amount of attention. The …

Key to realizing practical resonators for liquid-phase sensing applications is efficient
electromechanical transduction and reasonable Q in liquid, which determine the motional …

In this work a novel surface treatment is applied to thin-film piezoelectric-on-silicon disc
resonators that enables liquid phase operation of the resonator while maintaining a high …

In this paper, a solid disk resonator is designed for manufacturability inside a wafer-level
sealed cavity with fusion-bonding process. The device is then simulated using finite element …

Thin-film piezoelectric-on-silicon (TPoS) disc resonators, operating in 4-1 contour mode
around 17.2 MHz, are coated with Parylene from the backside to form a biocompatible …