DD Manickam, S Mohamed, V Jain… - 2023 IEEE 28th …, 2023 - ieeexplore.ieee.org
With the growing demand for semiconductor products, the semiconductor manufacturing industries are trying to increase their production capacities. Additional requirements and …
C Jugade, D Hartgers, S Mohamed… - 2023 European …, 2023 - ieeexplore.ieee.org
Industrial motion control systems, e. pick-andplace tasks in semiconductor manufacturing equipment, require precise positioning for achiering high machine throughput. Linear …
C Jugade, S Mohamed, D Goswami… - 2024 American …, 2024 - ieeexplore.ieee.org
The high-precision and high-speed positioning systems require position feedback with high accuracy at a higher frequency. As reported in recent literature, high accuracy and high …