The need of self-powered sensors and self-sustainable micro-/nano-systems is increasing
for smart home applications. With the aid of the fifth-generation (5G) wireless communication …

In the past decade, humidity measurements have ubiquitously gained consideration in the
wide range of application paradigms such as industrial predictive maintenance …

The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

In the Internet of Things (IoT) era, various devices (eg., sensors, actuators, energy
harvesters, etc.) and systems have been developed toward the realization of smart …

Flexible electronic devices are attracting widespread attentions and playing important roles
in the field of wearable electronics and health monitoring sensors, among which respiration …

Self-sustainable sensing systems composed of micro/nano sensors and nano-energy
harvesters contribute significantly to developing the internet of things (IoT) systems. As one …

The objective of this article is to review the recent advancement in piezoelectric
micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric …

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …

A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which
serves as both the structural and sensing layers. An open-air spatial atomic layer deposition …

Capacitive humidity sensors consisting of materials such as polymers, ceramics, and
piezoelectrics are widely used to monitor relative humidity levels. The effect of barium …