Advanced scanning probe lithography

R Garcia, AW Knoll, E Riedo - Nature nanotechnology, 2014 - nature.com
The nanoscale control afforded by scanning probe microscopes has prompted the
development of a wide variety of scanning-probe-based patterning methods. Some of these …

Thermal scanning probe lithography—a review

ST Howell, A Grushina, F Holzner… - Microsystems & …, 2020 - nature.com
Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-
SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with …

Nanomanufacturing of silicon surface with a single atomic layer precision via mechanochemical reactions

L Chen, J Wen, P Zhang, B Yu, C Chen, T Ma… - Nature …, 2018 - nature.com
Topographic nanomanufacturing with a depth precision down to atomic dimension is of
importance for advancement of nanoelectronics with new functionalities. Here we …

Triggering depolymerization: progress and opportunities for self-immolative polymers

RE Yardley, AR Kenaree, ER Gillies - Macromolecules, 2019 - ACS Publications
Polymers that depolymerize end-to-end upon cleavage of their backbones or end-caps,
often termed “self-immolative” polymers (SIPs), have garnered significant interest in recent …

Scanning probe lithography: state-of-the-art and future perspectives

P Fan, J Gao, H Mao, Y Geng, Y Yan, Y Wang, S Goel… - Micromachines, 2022 - mdpi.com
High-throughput and high-accuracy nanofabrication methods are required for the ever-
increasing demand for nanoelectronics, high-density data storage devices, nanophotonics …

Sub-10 nanometer feature size in silicon using thermal scanning probe lithography

YK Ryu Cho, CD Rawlings, H Wolf, M Spieser, S Bisig… - ACS …, 2017 - ACS Publications
High-resolution lithography often involves thin resist layers which pose a challenge for
pattern characterization. Direct evidence that the pattern was well-defined and can be used …

Stimuli-responsive temporary adhesives: enabling debonding on demand through strategic molecular design

ND Blelloch, HJ Yarbrough, KA Mirica - Chemical science, 2021 - pubs.rsc.org
Stimuli-responsive temporary adhesives constitute a rapidly developing class of materials
defined by the modulation of adhesion upon exposure to an external stimulus or stimuli …

Self-Immolative Polymers: From Synthesis to Applications

J Gong, B Tavsanli, ER Gillies - Annual Review of Materials …, 2024 - annualreviews.org
Polymers undergoing controlled degradation are of significant current interest. Among the
classes of degradable polymers, self-immolative polymers (SIPs) are attracting increasing …

Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

B Erbas, A Conde-Rubio, X Liu, J Pernollet… - Microsystems & …, 2024 - nature.com
Grayscale structured surfaces with nanometer-scale features are used in a growing number
of applications in optics and fluidics. Thermal scanning probe lithography achieves a lateral …

Mechanochemistry: Fundamental principles and applications

L Dong, L Li, H Chen, Y Cao, H Lei - Advanced Science, 2024 - Wiley Online Library
Mechanochemistry is an emerging research field at the interface of physics, mechanics,
materials science, and chemistry. Complementary to traditional activation methods in …