MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

This paper introduces a differential vibrating beam MEMS accelerometer demonstrating
excellent long-term stability for applications in gravimetry and seismology. The MEMS …

Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Recently, there have been notable advancements in energy harvesting from various
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …

Accelerometers are among the most mature sensor technologies with a broad range of
applications in multiple fields and industries. They represent the most widely used …

Mode-localized sensors have attracted attention because of their high parametric sensitivity
and first-order common-mode rejection to temperature drift. The high-fidelity detection of …

A sensitive micromachined resonant accelerometer that exhibits extremely low noise floor
and excellent bias stability is presented for future application of moving-base gravimetry. An …

Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer which combines the merits of optical measurement and Micro-Electro …

Tilt sensors have been widely used in many applications, such as instrumentation leveling,
oil drilling and structural health monitoring. With the rapid development of the micro …