Electromigration in three-dimensional integrated circuits

Z Shen, S Jing, Y Heng, Y Yao, KN Tu… - Applied Physics Reviews, 2023 - pubs.aip.org
The development of big data and artificial intelligence technology is increasing the need for
electronic devices to become smaller, cheaper, and more energy efficient, while also having …

Recent advances and trends in Cu–Cu hybrid bonding

JH Lau - IEEE Transactions on Components, Packaging and …, 2023 - ieeexplore.ieee.org
In this study, the recent advances and trends in Cu–Cu hybrid bonding will be investigated.
Emphasis is placed on the definition, kinds, advantages and disadvantages, challenges …

Hybrid bonding interconnect for advanced heterogeneously integrated processors

A Elsherbini, S Liff, J Swan, K Jun… - 2021 IEEE 71st …, 2021 - ieeexplore.ieee.org
Die stacking enables significant performance leaps in computing capability and
memory/processor integration. Conventional die stacking uses solder interconnects which …

Enabling hybrid bonding on Intel process

A Elsherbini, K Jun, R Vreeland… - 2021 IEEE …, 2021 - ieeexplore.ieee.org
In this paper, we holistically discuss the recent design, wafer fabrication and die assembly
changes needed to enable hybrid bonding interconnect (HBI) on Intel process. HBI enables …

Copper bonding technology in heterogeneous integration

YG Lee, M McInerney, YC Joo, IS Choi… - Electronic Materials …, 2024 - Springer
As semiconductor device scaling faces a severe technical bottleneck, vertical die stacking
technologies have been developed to obtain high performance, high density, low latency …

Integrated coherent Ising machines based on self-phase modulation in microring resonators

N Tezak, T Van Vaerenbergh, JS Pelc… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
We propose an integrated photonic circuit that acts as an optical coherent Ising machine and
simulates its performance on the basis of some example problems. In contrast to previous all …

Recess effect study and process optimization of sub-10 μm pitch die-to-wafer hybrid bonding

H Ren, YT Yang, SS Iyer - 2022 IEEE 72nd Electronic …, 2022 - ieeexplore.ieee.org
To achieve fine-pitch, SOC-like I/O communication, and to realize heterogeneous
integration, die-to-wafer (D2W) hybrid bonding (HB) is being investigated extensively. HB is …

[图书][B] Chiplet design and heterogeneous integration packaging

JH Lau - 2023 - Springer
There are at least five different chiplet design and heterogeneous integration packaging,
namely (1) chip partition and heterogeneous integration (driven by cost and technology …

Excellent reliability of Xtacking™ bonding interface

Y Ouyang, S Yang, D Yin, X Huang… - 2021 IEEE …, 2021 - ieeexplore.ieee.org
Xtacking™ is a novel 3D (three-dimensional) NAND flash architecture, in which memory
cells and peripheral circuits are bonded by millions of pairs of small-pitch metal vias …

Towards interconnection pitch with Die-to-Wafer direct hybrid bonding

E Bourjot, C Castan, N Nadi, A Bond… - 2021 IEEE 71st …, 2021 - ieeexplore.ieee.org
Die-to-wafer direct hybrid bonding process is foreseen as a key enabler of heterogeneous
3D integration. Hybrid bonding technologies were first developed on W2W assembly …