Annealing-induced defects and optical degradation in sputter-deposited silicon nitride: Implications for photonic applications
D You, Y Jiang, W Li, Y Zhao, L Wan, M Tan - Ceramics International, 2024 - Elsevier
Silicon nitride (SiN x) is a critical material for advanced photonic applications. This study
investigates the effect of annealing on sputter-deposited silicon nitride. The results …
investigates the effect of annealing on sputter-deposited silicon nitride. The results …
[PDF][PDF] Reflectance Characteristics of Silicon Surface Fabricated with the Arrays of Uniform Inverted Pyramid Microstructures in UV-Visible Range
MF Abdullah, AM Hashim - Sains Malaysiana, 2019 - journalarticle.ukm.my
In this paper, inverted pyramidal microstructures are designed and fabricated on silicon (Si)
surface. The characteristics of surface reflectance are simulated using two-dimensional (2D) …
surface. The characteristics of surface reflectance are simulated using two-dimensional (2D) …