Temperature-dependent properties of wurtzite and rock salt ScxAl1-xN for applications in BAW resonators
S Mihalic, E Wade, P Ott… - Journal of Physics D …, 2024 - iopscience.iop.org
Scandium aluminum nitride (AlxSc1-xN) is known for its tremendous enhancement of
piezoelectric properties. This material can improve the energy efficiency of a wide range of …
piezoelectric properties. This material can improve the energy efficiency of a wide range of …
[HTML][HTML] Piezoelectric thin films for MEMS
Piezoelectric materials have excellent energy conversion efficiency between mechanical
and electrical domains and have been used in a variety of electromechanical devices …
and electrical domains and have been used in a variety of electromechanical devices …
Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (11 2¯ 0) \left(\right.11⋅20\left.\right) …
W Xie, W Xuan, D Fu, Y Jiang, Q Wang… - physica status solidi …, 2024 - Wiley Online Library
Herein, a high‐quality Al0. 56Sc0. 44N (11 2¯ 0) \left(\right.11⋅20\left.\right) piezoelectric
thin‐film‐based surface acoustic wave (SAW) resonator is developed. The Al0. 56Sc0. 44N …
thin‐film‐based surface acoustic wave (SAW) resonator is developed. The Al0. 56Sc0. 44N …
High-Q SAW Resonators Based on High-Crystallinity AlScN-AlN-Sapphire Substrate
This work reports on surface acoustic wave (SAW) piezoelectric resonators with high quality
factor (Q) based on high-crystallinity aluminum scandium nitride (AlScN) thin films. The …
factor (Q) based on high-crystallinity aluminum scandium nitride (AlScN) thin films. The …