Low threshold voltage and high phase transition performance of ITO/VO₂: W composite films deposited by reactive magnetron sputtering

Y Lei, J Qi, L Li, X Tian, J Chen, L Ye, P Lu… - Materials Science in …, 2025 - Elsevier
Vanadium dioxide (VO 2) exhibits an interesting semiconductor-metal phase transition
characteristics, which can be applied in many fields. For low power VO 2-based …

Robust control of VO2-coated microactuators based on self-sensing feedback

E Merced, J Zhang, X Tan… - 2013 IEEE/ASME …, 2013 - ieeexplore.ieee.org
A novel self-sensing and robust control technique is presented for a vanadium dioxide (VO
2)-coated silicon (Si) microactuator. The deflection output of the microactuator is estimated …

MIT/PCM-based RF Switches for Tunable Filter Application

J Jiang - 2019 - uwspace.uwaterloo.ca
Tunable filters are promising for reducing the size of communication systems by replacing
switch filter bank, also they are gaining more attention for satellite applications which will …

VO2 thin films for micromanipulators

C Ramsey, R Cabrera, E Merced… - … Materials and Devices …, 2012 - ieeexplore.ieee.org
The use of VO 2 thin films as the active element in micromanipulators of multiple degrees of
freedom is studied. It is shown that the insulator-to-metal transition of VO 2, which occurs at …

Development of vanadium dioxide-based tunable micro-resonators

EJ Merced-Grafals - 2011 - search.proquest.com
This work presents the development of a tunable micro-mechanical resonator capable of
reaching resonant frequency shifts of 23%. The resonator consists of a simple SiO 2 bridge …

[引用][C] Development of VO2-based tunable micro-resonators