[HTML][HTML] Conductive nitrides: Growth principles, optical and electronic properties, and their perspectives in photonics and plasmonics

P Patsalas, N Kalfagiannis, S Kassavetis… - Materials Science and …, 2018 - Elsevier
The nitrides of most of the group IVb-Vb-VIb transition metals (TiN, ZrN, HfN, VN, NbN, TaN,
MoN, WN) constitute the unique category of conductive ceramics. Having substantial …

Structure and properties of TiN coatings

JE Sundgren - Thin solid films, 1985 - Elsevier
During the last few years there has been increasing interest in TiN thin films deposited by
various physical vapour deposition methods. Since the films are grown by various …

Oxides and nitrides as alternative plasmonic materials in the optical range

GV Naik, J Kim, A Boltasseva - Optical materials express, 2011 - opg.optica.org
As alternatives to conventional metals, new plasmonic materials offer many advantages in
the rapidly growing fields of plasmonics and metamaterials. These advantages include low …

Titanium nitride as a plasmonic material for visible and near-infrared wavelengths

GV Naik, JL Schroeder, X Ni, AV Kildishev… - Optical Materials …, 2012 - opg.optica.org
The search for alternative plasmonic materials with improved optical properties, easier
fabrication and integration capabilities over those of the traditional materials such as silver …

Reactive-sputter-deposited TiN films on glass substrates

J Pelleg, LZ Zevin, S Lungo, N Croitoru - Thin solid films, 1991 - Elsevier
Sputter-deposited TiN thin films on glass substrate were investigated by X-ray diffraction
analysis. The lattice parameter determined on the basis of (200) and (220) peaks is smaller …

Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness

U Helmersson, S Todorova, SA Barnett… - Journal of Applied …, 1987 - pubs.aip.org
Single-crystal TiN/VN strained-layer § uperlattices (SLS's) with layer thicknesses lEN= lVN=
A 12 (where). is the period of the superlattice) ranging from 0.75 to 16 nm have been grown …

Thermal stability of nitride thin films

L Hultman - Vacuum, 2000 - Elsevier
This paper is a review of the thermal stability of state-of-the-art transition metal nitride thin
films synthesized by physical vapour deposition techniques. Nitrides are successfully …

[图书][B] Film deposition by plasma techniques

M Konuma - 2012 - books.google.com
Properties of thin films depend strongly upon the deposition technique and conditions
chosen. In order to achieve the desired film, optimum deposition conditions have to be found …

Surface characterisation of plasma-nitrided titanium: an XPS study

I Bertoti, M Mohai, JL Sullivan, SO Saied - Applied surface science, 1995 - Elsevier
DC plasma nitriding was applied to titanium metal sheets in a commercial cell using Ar+
NH3 as the admixture and the nitrided surface investigated by means of XPS. As a …

Titanium nitride films for ultrasensitive microresonator detectors

HG Leduc, B Bumble, PK Day, BH Eom, J Gao… - Applied Physics …, 2010 - pubs.aip.org
Titanium nitride (TiN x) films are ideal for use in superconducting microresonator detectors
for the following reasons:(a) the critical temperature varies with composition (0< T c< 5 …