Brittle failure of components weakened by cracks or sharp and blunt V-notches is a topic of
active and continuous research. It is attractive for all researchers who face the problem of …

This review paper covers a topic of significant importance in micro-and nano-systems
development and manufacturing, specifically the residual stresses in deposited thin-film …

A study has been made to discern the mechanisms for the delayed failure of 2-μm thick
structural films of n+-type, polycrystalline silicon under high-cycle fatigue loading conditions …

Over the last few years, considerable effort has gone into the study of the failure
mechanisms and reliability of micro-electromechanical systems (MEMS). Although still very …

Fracture toughness testing of materials at the micrometer scale has become essential due to
the continuing miniaturization of devices accompanied by findings of size effects in fracture …

Lilliputian techniques for measuring the mechanical response of microscale specimens are
being developed to characterize the performance and reliability of microelectromechanical …

Microelectromechanical systems (MEMS) are of high interest for recent electronic
applications. Their applications range from medicine to measurement technology, from …

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …

To evaluate the long-term durability properties of materials for microelectromechanical
systems (MEMS), the stress-life (S/N) cyclic fatigue behavior of a 2-μm thick polycrystalline …

We show that chevron-notched samples offer an attractive approach to the measurement of
fracture toughness in micron-scale samples of brittle materials and use the method to …