[HTML][HTML] Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

YQ Fu, JK Luo, NT Nguyen, AJ Walton… - Progress in Materials …, 2017 - Elsevier
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Engineering inclined orientations of piezoelectric films for integrated acoustofluidics and lab-on-a-chip operated in liquid environments

YQ Fu, HF Pang, H Torun, R Tao, G McHale, J Reboud… - Lab on a Chip, 2021 - pubs.rsc.org
Different acoustic wave modes are required for effective implementation of biosensing and
liquid actuation functions in an acoustic wave-based lab-on-a-chip. For efficient sensing in …

[HTML][HTML] Two-dimensional equations for piezoelectric thin-film acoustic wave resonators

N Li, Z Qian, J Yang - International Journal of Solids and Structures, 2017 - Elsevier
We derived a system of two-dimensional equations for thickness-extensional vibrations of a
four-layered plate consisting of a piezoelectric thin film on an elastic substrate with driving …

An analysis of nonlinear thickness vibration frequencies of multi-layered film bulk acoustic resonators

Y Chen, Y Guo, R Wu, J Wang, H Jing, J Lin, Y Tian… - Ultrasonics, 2023 - Elsevier
The fast reduction of the physical size of film bulk acoustic wave resonators as a layered
structure implies the intensification of the electric field which can induce large deformation in …

Sensitivity analysis of piezo-driven stepped cantilever beams for simultaneous viscosity and density measurement

C Zhang, SH Siegel, S Yenuganti… - Smart Materials and …, 2019 - iopscience.iop.org
This paper presents a study on the sensitivity analysis of a smart sensing system for
simultaneous measurement of a viscous fluid's viscosity and density. The proposed system …

Quartz crystal microbalance for viscosity measurement with temperature self-compensation

S Yenuganti, C Zhang, H Zhang - Mechatronics, 2019 - Elsevier
This paper presents the design, fabrication, and experimental demonstration of a portable
viscosity measurement system using an AT-cut quartz crystal resonator with a temperature …

[HTML][HTML] Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators

N Li, Z Qian, J Yang - AIP Advances, 2017 - pubs.aip.org
We studied mode couplings in thin film bulk acoustic wave resonators of a piezoelectric film
on a dielectric layer operating with the fundamental thickness-extensional mode. A system of …

Design considerations for frequency shifts in a laterally finite FBAR sensor in contact with the newtonian liquid

Z Zhao, B Wang, Z Qian, I Kuznetsova… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
Mode-coupled vibrations in a thickness-shear (TSh) mode and laterally finite film bulk
acoustic resonator (FBAR) with one face in contact with Newtonian (linearly viscous and …

Mode couplings in high-frequency thickness-extensional vibrations of ZnO thin film resonator based on weak boundary condition

Z Zhao, B Wang, J Zhu, Z Qian - International Journal of Mechanical …, 2018 - Elsevier
In this paper, the mode coupling vibration of finite ZnO thin film resonator (FBAR) with its c-
axis along the thickness direction operating at the thickness-extensional mode is studied …

Lateral size-dependence in UHF mode-coupled ZnO FBARs to suppress undesirable eigen-modes and weaken mounting effect

Z Zhao, X Pang, Z Qian, I Kuznetsova… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
Mode-coupled vibrations in an ultra-high frequency (UHF) ZnO thin film bulk acoustic
resonator (FBAR) operating at thickness-extensional (TE) mode are studied by employing …