Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques

J Albero, L Nieradko, C Gorecki, H Ottevaere… - Optics express, 2009 - opg.optica.org
We report a novel process technology of hemispherical shaped microlenses, using isotropic
wet etching of silicon in an acid solution to produce the microlenses molds. Governed by …

[图书][B] Bonding in microsystem technology

JA Dziuban - 2007 - books.google.com
Bonding in Microsystem Technology concerns the exciting field of microsystems (known
under varying names as: MEMS, μTAS (analytical or chemical Microsystems), MOEMS: the …

Graded-size microlens array by the pyro-electrohydrodynamic continuous printing method

IA Grimaldi, S Coppola, F Loffredo, F Villani… - Applied …, 2013 - opg.optica.org
In the present work, the pyro-electrohydrodynamic technique was used for the realization of
tunable-size microlens arrays. Poly (methyl methacrylate) dissolved in different solvent …

Printing of polymer microlenses by a pyroelectrohydrodynamic dispensing approach

IA Grimaldi, S Coppola, F Loffredo, F Villani… - Optics letters, 2012 - opg.optica.org
The investigation of a method for fabricating microlenses by a nozzle-free inkjet printing
approach is reported. The new method, based on a pyroelectrohydrodynamic mechanism, is …

Efficient fluorescence collection and ion imaging with the “tack” ion trap

G Shu, CK Chou, N Kurz, MR Dietrich, BB Blinov - JOSA B, 2011 - opg.optica.org
Trapped, laser-cooled atoms and ions produce intense fluorescence of the order 10^ 7~ 10^
8 photons per second. Detection of this fluorescence enables efficient measurement of the …

Hartmann-Shack test with random masks for modal wavefront reconstruction

O Soloviev, G Vdovin - Optics Express, 2005 - opg.optica.org
The paper discusses the influence of the geometry of a Hartmann-(Shack) wavefront sensor
on the total error of modal wavefront reconstruction. A mathematical model is proposed …

Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems

M Baranski, S Bargiel, N Passilly, C Gorecki, C Jia… - Applied …, 2015 - opg.optica.org
This paper presents the optical design of a miniature 3D scanning system, which is fully
compatible with the vertical integration technology of micro-opto-electro-mechanical systems …

Optimized microlens-array geometry for Hartmann–Shack wavefront sensor

OG Oliveira, DW de Lima Monteiro… - Optics and Lasers in …, 2014 - Elsevier
This work presents the fabrication and test of microlens arrays for Hartmann–Shack
wavefront sensor, which were optimized, in terms of geometry, to be applied to the …

Properties of microlenses produced on a layer of tot'hema and eosin sensitized gelatin

BD Murić, DV Pantelić, DM Vasiljević, BM Panić - Applied optics, 2007 - opg.optica.org
Gelatin sensitized with tot'hema and eosin (compounds used in medical therapy) appears to
be an excellent material for microlens fabrication. Lenses are produced by irradiation with a …

Arrayed silicon-based concave microlens fabricated by single mask ultraviolet-photolithography and dual-step KOH etching

B Zhang, T Liu, Z Wang, W Huang, C Hu… - Journal of Optical …, 2022 - spiedigitallibrary.org
Background: As an important optical element, concave microlens arrays are utilized in many
applications. How to fabricate a mass of concave microlens arrays efficiently at a low cost is …