Superconformal film growth: from smoothing surfaces to interconnect technology

TP Moffat, TM Braun, D Raciti… - Accounts of Chemical …, 2023 - ACS Publications
Conspectus Electronics manufacturing involves Cu electrodeposition to form 3D circuitry of
arbitrary complexity. This ranges from nanometer-wide interconnects between individual …

Laser ionization mass spectrometry at 55: Quo Vadis?

VA Azov, L Mueller, AA Makarov - Mass Spectrometry Reviews, 2022 - Wiley Online Library
Laser ionization mass spectrometry (LIMS) was one of the first practical methods developed
for in situ analysis of the surfaces of solid samples. This review will encompass several …

Current progress in femtosecond laser ablation/ionisation time-of-flight mass spectrometry

M Tulej, NFW Ligterink, C de Koning, V Grimaudo… - Applied Sciences, 2021 - mdpi.com
The last decade witnessed considerable progress in the development of laser
ablation/ionisation time-of-flight mass spectrometry (LI-TOFMS). The improvement of both …

Effect of chloride concentration on copper deposition in through silicon vias

TM Braun, D Josell, M Silva, J Kildon… - Journal of The …, 2019 - iopscience.iop.org
Bottom-up Cu deposition in metallized through silicon vias (TSV) depends on a co-adsorbed
polyether–Cl− suppressor layer that selectively breaks down within recessed surface …

In Situ Lunar Regolith Analysis by Laser-Based Mass Spectrometry

P Wurz, T Bandy, P Mandli, S Studer… - 2023 IEEE …, 2023 - ieeexplore.ieee.org
We are developing laser-based mass spectrometry (LIMS) for the in situ investigation of the
chemical and mineralogical composition of the lunar regolith. The current development of …

Observation of the behavior of additives in copper electroplating using a microfluidic device

T Akita, M Tomie, R Ikuta, H Egoshi… - Journal of the …, 2018 - iopscience.iop.org
The suppression behavior of copper electrodeposition by additives was studied using a
microfluidic device. Strong suppression and its cessation due to additive adsorption and …

Laser ablation ionization mass spectrometry (LIMS) for analysis of electrodeposited cu interconnects

V Grimaudo, P Moreno-García, A Riedo… - Journal of The …, 2018 - iopscience.iop.org
In this contribution highly sensitive and quantitative analytical methodologies based on
femtosecond Laser Ablation Ionization Mass Spectrometry (fs-LIMS) for the analysis of …

Isotope abundance ratio measurements using femtosecond laser ablation ionization mass spectrometry

M Tulej, A Neubeck, A Riedo… - Journal of mass …, 2020 - Wiley Online Library
Accurate isotope ratio measurements are of high importance in various scientific fields,
ranging from radio isotope geochronology of solids to studies of element isotopes …

Determination of the microscopic mineralogy of inclusion in an amygdaloidal pillow basalt by fs-LIMS

M Tulej, R Lukmanov, V Grimaudo, A Riedo… - Journal of Analytical …, 2021 - pubs.rsc.org
We present chemical depth profiling studies on mineralogical inclusions embedded in
amygdale calcium carbonate by our Laser Ablation Ionisation Mass Spectrometer designed …

Three-dimensional composition analysis of SnAg solder bumps using ultraviolet femtosecond laser ablation ionization mass spectrometry

A Cedeño López, V Grimaudo, A Riedo… - Analytical …, 2019 - ACS Publications
The application of a novel UV fs Laser Ablation Ionization Mass Spectrometry approach for
chemical depth profiling of low-melting point, high surface roughness SnAg solder bump …