Virtual metrology as an approach for product quality estimation in Industry 4.0: a systematic review and integrative conceptual framework
PA Dreyfus, F Psarommatis, G May… - International Journal of …, 2022 - Taylor & Francis
Virtual metrology (VM) involves estimating a product's quality directly from production
process data without physically measuring it. This enables the product quality of each unit of …
process data without physically measuring it. This enables the product quality of each unit of …
Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing
Virtual metrology (VM) has been employed to improve the performance of advanced process
control for semiconductor manufacturing. A number of VM models have been proposed to …
control for semiconductor manufacturing. A number of VM models have been proposed to …
Semi-supervised support vector regression based on self-training with label uncertainty: An application to virtual metrology in semiconductor manufacturing
Dataset size continues to increase and data are being collected from numerous
applications. Because collecting labeled data is expensive and time consuming, the amount …
applications. Because collecting labeled data is expensive and time consuming, the amount …
PrePass-Flow: A Machine Learning based technique to minimize ACL policy violation due to links failure in hybrid SDN
The centralized architecture of Software-Defined Networking (SDN) reduces networking
complexity and improves network manageability by omitting the need for box-by-box …
complexity and improves network manageability by omitting the need for box-by-box …
IHSF: An intelligent solution for improved performance of reliable and time-sensitive flows in hybrid SDN-based FC IoT systems
The integration of software-defined networking (SDN) into legacy networks causes both
operational and deployment issues. In this context, this article proposes a novel approach …
operational and deployment issues. In this context, this article proposes a novel approach …
Using regression models for predicting the product quality in a tubing extrusion process
Quality in a manufacturing process implies that the performance characteristics of the
product and the process itself are designed to meet specific objectives. Thus, accurate …
product and the process itself are designed to meet specific objectives. Thus, accurate …
Spam SMS detection for Turkish language with deep text analysis and deep learning methods
With the increasing number of mobile users day by day, the security of mobile phones is an
important issue. SMS service available as standard in all users; advertising makes it a …
important issue. SMS service available as standard in all users; advertising makes it a …
Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process
KB Lee, CO Kim - Journal of Intelligent Manufacturing, 2020 - Springer
In semiconductor manufacturing, the chemical mechanical planarization (CMP) process
produces higher thickness variability in the edge area of the wafer than that in the center …
produces higher thickness variability in the edge area of the wafer than that in the center …
Development of convolutional neural network based Gaussian process regression to construct a novel probabilistic virtual metrology in multi-stage semiconductor …
Manufacturing of semiconductor chips involves hundreds of process steps. For high-
throughput semiconductor manufacturers, it is not feasible to get all the quality …
throughput semiconductor manufacturers, it is not feasible to get all the quality …
Online state‐of‐health prediction of lithium‐ion batteries with limited labeled data
Summary State‐of‐health (SOH) plays a vital role in battery health management and power
system stability. This process can be achieved by capacity estimation. However, in practice …
system stability. This process can be achieved by capacity estimation. However, in practice …