Optical properties and crystallinity of hydrogenated nanocrystalline silicon (nc-Si: H) thin films deposited by rf-PECVD
Hydrogenated nanocrystalline silicon (nc-Si: H) thin films prepared in a home-built radio-
frequency (rf) plasma enhanced chemical vapour deposition (PECVD) system have been …
frequency (rf) plasma enhanced chemical vapour deposition (PECVD) system have been …
In situ plasma monitoring of PECVD nc-Si: H films and the influence of dilution ratio on structural evolution
YL Hsieh, LH Kau, HJ Huang, CC Lee, YK Fuh, TT Li - Coatings, 2018 - mdpi.com
We report plasma-enhanced chemical vapor deposition (PECVD) hydrogenated nano-
crystalline silicon (nc-Si: H) thin films. In particular, the effect of hydrogen dilution ratio (R …
crystalline silicon (nc-Si: H) thin films. In particular, the effect of hydrogen dilution ratio (R …
Structural and optical properties of nc-Si: H thin films deposited by layer-by-layer technique
Hydrogenated nanocrystalline silicon (nc-Si: H) thin films deposited on c-Si and quartz
substrates by layer-by-layer (LBL) technique using radio-frequency plasma enhanced …
substrates by layer-by-layer (LBL) technique using radio-frequency plasma enhanced …
Effect of power on crystallinity and opto-electronic properties of silicon thin films grown using VHF PECVD process
S Juneja, S Kumar - Silicon, 2021 - Springer
The silicon thin films have been deposited using VHF (60 MHz) plasma enhanced chemical
vapor deposition (PECVD) process. The influence of the power (10–50 W), used during the …
vapor deposition (PECVD) process. The influence of the power (10–50 W), used during the …
Origin of photoluminescence in nanocrystalline Si: H films
AM Ali - Journal of luminescence, 2007 - Elsevier
We have studied the origin of photoluminescence (PL) from hydrogenated nanocrystalline
silicon (nc-Si: H) films produced by a plasma-enhanced chemical vapor deposition …
silicon (nc-Si: H) films produced by a plasma-enhanced chemical vapor deposition …
Correlation between microstructure and properties of hydrogenated Si thin films grown by plasma enhanced chemical vapor deposition under different hydrogen flow …
In order to characterize the surface of nanocrystalline hydrogenated silicon (nc-Si: H) and to
get more insight into the film's growth deposited by plasma enhanced chemical vapor …
get more insight into the film's growth deposited by plasma enhanced chemical vapor …
Chromium‐Induced Nanocrystallization of a‐Si Thin Films into the Wurtzite Structure
KUM Kumar, MG Krishna - Journal of Nanomaterials, 2008 - Wiley Online Library
Chromium metal‐induced nanocrystallization of amorphous silicon (a‐Si) thin films is
reported. The nanocrystalline nature of these films is confirmed from X‐ray diffraction and …
reported. The nanocrystalline nature of these films is confirmed from X‐ray diffraction and …
Room temperature synthesis of nanocrystalline silicon by aluminium induced crystallization for solar cell applications
IYY Bu - Vacuum, 2011 - Elsevier
The aim of this study is to synthesis large area, plastic compatible of p-type nanocrystalline
silicon through conventional sputter system. The growth of and p-type doping of …
silicon through conventional sputter system. The growth of and p-type doping of …
Optimized nc-Si: H thin films with enhanced optoelectronic properties prepared by micro-waves PECVD used as an effective silicon surface passivation layer
S El Whibi, L Derbali, P Tristant, C Jaoul… - Journal of Materials …, 2019 - Springer
In this work we investigated a novel approach to elaborate hydrogenated nanocrystalline
silicon (nc-Si: H) thin films using microwave plasma enhanced chemical vapor deposition …
silicon (nc-Si: H) thin films using microwave plasma enhanced chemical vapor deposition …
Structural and optical properties of the nc-Si: H thin films irradiated by high energetic ion beams
Hydrogenated nanocrystalline silicon (nc-Si: H) thin films deposited by radio-frequency
plasma enhanced chemical vapour deposition was irradiated by an energetic ion beam …
plasma enhanced chemical vapour deposition was irradiated by an energetic ion beam …