30 years of atomic force microscopy: creep, hysteresis, cross-coupling, and vibration problems of piezoelectric tube scanners

H Habibullah - Measurement, 2020 - Elsevier
This paper presents a brief history of scanning probe microscopes (SPMs) and a general
insight into an atomic force microscope (AFM), including its operating principles, modes …

Dynamic force characterization microscopy based on integrated nanorobotic AFM and SEM system for detachment process study

Y Shen, M Nakajima, Z Zhang… - … /ASME Transactions on …, 2015 - ieeexplore.ieee.org
In this paper, an integrated system, named dynamic force characterization microscopy
(DFCM), is proposed to investigate the detachment process at small scale. This system is …

High performance control of an atomic force microscope for faster image scanning

MS Rana - 2014 - unsworks.unsw.edu.au
The performance of the atomic force microscope (AFM), a nanoscale imaging tool, is
significantly influenced by the dynamics of the piezoelectric tube scanner (PTS). The …

Calibration of a class of 3 DOF serial micro robotic systems through SEM vision: application to vertical AFM tip landing

J Cailliez, M Boudaoud… - … , Automation and Robotics …, 2019 - ieeexplore.ieee.org
When performing manipulation at small scales, the micro-robotic system and the vision
system axes often aren't aligned, leading to low accuracy. To asses this issue it is possible to …

High-precision nanopositioning control of a piezoelectric tube scanner: Atomic force microscopy

H Habibullah - 2016 - unsworks.unsw.edu.au
A piezoelectric tube scanner (PTS) is made of a piezoelectric material (PZM) is used in an
atomic force microscopy (AFM) for sub-nanometre range positioning of a sample. High …