Recent developments in superjunction power devices

C Ma, W Chen, T Liu, W Zhang… - Journal of …, 2024 - iopscience.iop.org
Superjunction (SJ) is one of the most innovative concepts in the field of power
semiconductor devices and is often referred to as a" milestone" in power MOS. Its balanced …

First demonstration of vertical superjunction diode in GaN

M Xiao, Y Ma, Z Du, Y Qin, K Liu… - 2022 International …, 2022 - ieeexplore.ieee.org
We report the first experimental demonstration of a vertical superjunction device in GaN. P-
type nickel oxide (NiO) is sputtered conformally in 6μm deep n-GaN trenches. Sputter recipe …

1 kV self-aligned vertical GaN superjunction diode

Y Ma, M Porter, Y Qin, J Spencer, Z Du… - IEEE Electron …, 2023 - ieeexplore.ieee.org
This work demonstrates vertical GaN superjunction (SJ) diodes fabricated via a novel self-
aligned process. The SJ comprises n-GaN pillars wrapped by the charge-balanced p-type …

GaN Super-Heterojunction FETs With 10-kV Blocking and 3-kV Dynamic Switching

JT Kemmerling, R Guan, M Sadek… - … on Electron Devices, 2024 - ieeexplore.ieee.org
This article reports on two generations of GaN-on-sapphire super-heterojunction (SHJ)
transistors, aiming at the realization of 10-kV class power transistors with low static and …

Intrinsic polarization super junctions: Design of single and multichannel GaN structures

L Nela, C Erine, AM Zadeh… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Super junctions (SJs) have enabled unprecedented performance in Silicon power devices,
which could be further improved by applying this concept to wide bandgap semiconductors …

The Influence of Hole Transport in GaN Super-Heterojunction Transistor Switching Time

JT Kemmerling, Y Du, R Chu - IEEE Transactions on Electron …, 2024 - ieeexplore.ieee.org
The superjunction (SJ), historically a silicon technology, has emerged as an effective
method to increase blocking voltage with reduced ON-resistance. A previous report of …

2.69 kV/2.11 mΩ⋅ cm and Low Leakage p-GaN Stripe Array Gated Hybrid Anode Diodes With Low Turn-on Voltage

X Wei, W Shen, X Zhou, W Tang, Y Ma… - IEEE Electron …, 2022 - ieeexplore.ieee.org
In this letter, we demonstrate high-performance lateral AlGaN/GaN hybrid anode diodes
(HADs) with p-GaN stripe array gate (PSAG) structure with much reduced turn-on voltage () …

Impact of charge balance on static and dynamic characteristics of GaN super-heterojunction Schottky barrier diodes

JT Kemmerling, R Guan, M Sadek… - IEEE Electron …, 2022 - ieeexplore.ieee.org
This letter reports the first controlled experimental study on the impact of charge-balance on
static and dynamic characteristics of GaN super-heterojunction Schottky barrier diodes (SHJ …

(Ultra-) Wide-Bandgap Heterogeneous Superjunction: Design, Performance Limit, and Experimental Demonstration

Y Qin, Y Ma, M Xiao, M Porter, F Udrea… - … on Electron Devices, 2024 - ieeexplore.ieee.org
Superjunction (SJ) breaks the performance limit of conventional power devices via
multidimensional electrostatic engineering. Following a commercial success in Si, it has …

Physics-based 3D simulation of single event transient current in GaN high-electron-mobility transistor and super-heterojunction field-effect transistor

J Song, A Chakravorty, M Jin, R Chu - Applied Physics Letters, 2024 - pubs.aip.org
Physics-based 3D simulations were conducted on a GaN high-electron-mobility transistor
(HEMT) and a super-heterojunction field-effect transistor (SHJFET) to investigate the single …