Design and characterization of high-Q SAW resonators based on the AlN/Sapphire structure intended for high-temperature wireless sensor applications

J Streque, J Camus, T Laroche, S Hage-Ali… - IEEE Sensors …, 2020 - ieeexplore.ieee.org
Aluminium nitride piezoelectric thin films grown on sapphire are strong candidates for high-
temperature surface acoustic wave (SAW) sensors, due to their thermal stability, large …

Surface acoustic wave sensor based on Au/TiO2/PEDOT with dual response to carbon dioxide and humidity

C Wang, Y Ding, M Li, H Li, S Xu, C Li, L Qian… - Analytica Chimica …, 2022 - Elsevier
A surface acoustic wave (SAW) gas sensor with an Au/TiO 2/poly (3, 4-
ethylenedioxythiophene)(PEDOT, which is a conductive polymer with photoelectric …

Investigation of the coupled Lamb waves propagation in viscoelastic and anisotropic multilayer composites by Legendre polynomial method

S Dahmen, MB Amor, MHB Ghozlen - Composite Structures, 2016 - Elsevier
In this paper, the attenuation of guided waves in damped multilayered arbitrary anisotropic
composite laminates is investigated using a Legendre orthogonal polynomial approach. The …

New generation of SAW devices on advanced engineered substrates combining piezoelectric single crystals and silicon

S Ballandras, E Courjon, F Bernard… - … Joint Conference of …, 2019 - ieeexplore.ieee.org
This paper describes a new generation of composite substrates dedicated to advanced
surface acoustic wave (SAW) devices. For very long years, SAW applications (filtering …

High-frequency surface acoustic waves excited on thin-oriented LiNbO/sub 3/single-crystal layers transferred onto silicon

T Pastureaud, M Solal, B Biasse… - ieee transactions on …, 2007 - ieeexplore.ieee.org
The need for high-frequency, wide-band filters has instigated many developments based on
combining thin piezoelectric films and high acoustic velocity materials (sapphire, diamond …

Guided wave propagation in multilayered piezoelectric structures

YQ Guo, WQ Chen, YL Zhang - Science in China Series G: Physics …, 2009 - Springer
A general formulation of the method of the reverberation-ray matrix (MRRM) based on the
state space formalism and plane wave expansion technique is presented for the analysis of …

Influence of the V/III ratio in the gas phase on thin epitaxial AlN layers grown on (0001) sapphire by high temperature hydride vapor phase epitaxy

A Claudel, V Fellmann, I Gélard, N Coudurier… - Thin Solid Films, 2014 - Elsevier
Abstract Thin (0001) epitaxial aluminum nitride (AlN) layers were grown on c-plane sapphire
using high temperature hydride vapor phase epitaxy. The experimental set-up consists of a …

High temperature chemical vapor deposition of aluminum nitride, growth and evaluation

M Pons, R Boichot, N Coudurier, A Claudel… - Surface and Coatings …, 2013 - Elsevier
The application of AlN films in optoelectronics, sensors and high temperature coatings is
strongly dependent on the nano-micro-structure of the film, impurity level and defect density …

GHz frequency zno/si saw device

L Le Brizoual, F Sarry, O Elmazria… - IEEE transactions on …, 2008 - ieeexplore.ieee.org
The demand for high-frequency low-loss filters generates intensive research on innovative
wave guide solutions. In this work, a GHz SAW device based on a ZnO/Si structure was …

[HTML][HTML] Free-ultrasonic waves in multilayered piezoelectric plates: An improvement of the Legendre polynomial approach for multilayered structures with very …

J Yu, JE Lefebvre, YQ Guo - Composites Part B: Engineering, 2013 - Elsevier
In 1999, Legendre polynomial approach has been proposed to solve wave propagation in
the multilayered piezoelectric plate. However, it can deal with the multilayered plate only …