Recent progress in the development of backplane thin film transistors for information displays

D Ji, J Jang, JH Park, D Kim, YS Rim… - Journal of Information …, 2021 - Taylor & Francis
This review aims to provide a technical roadmap and progress update for backplane thin film
transistors (TFTs) used in organic light emitting diodes flat panel displays and next …

CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor

W Wang, K Li, J Lan, M Shen, Z Wang, X Feng… - Nature …, 2023 - nature.com
The development of high-performance oxide-based transistors is critical to enable very large-
scale integration (VLSI) of monolithic 3-D integrated circuit (IC) in complementary metal …

Achieving a low-voltage, high-mobility IGZO transistor through an ALD-derived bilayer channel and a hafnia-based gate dielectric stack

MH Cho, CH Choi, HJ Seul, HC Cho… - ACS Applied Materials …, 2021 - ACS Publications
Ultrahigh-resolution displays for augmented reality (AR) and virtual reality (VR) applications
require a novel architecture and process. Atomic-layer deposition (ALD) enables the facile …

Progress in the Development of Active-Matrix Quantum-Dot Light-Emitting Diodes Driven by Non-Si Thin-Film Transistors

GW Baek, YJ Kim, M Lee, Y Kwon, B Chun, G Park… - Materials, 2022 - mdpi.com
This paper aims to discuss the key accomplishments and further prospects of active-matrix
(AM) quantum-dot (QD) light-emitting diodes (QLEDs) display. We present an overview and …

Characteristics of ALD‐ZnO Thin Film Transistor Using H2O and H2O2 as Oxygen Sources

J Yang, A Bahrami, X Ding, S Lehmann… - Advanced Materials …, 2022 - Wiley Online Library
ZnO thin films are deposited by atomic layer deposition (ALD) using diethylzinc as the Zn
source and H2O and H2O2 as oxygen sources. The oxidant‐and temperature‐dependent …

Wafer-Scale Growth of Sb2Te3 Films via Low-Temperature Atomic Layer Deposition for Self-Powered Photodetectors

J Yang, J Li, A Bahrami, N Nasiri… - … Applied Materials & …, 2022 - ACS Publications
In this work, we demonstrate the performance of a silicon-compatible, high-performance,
and self-powered photodetector. A wide detection range from visible (405 nm) to near …

One-volt, solution-processed InZnO thin-film transistors

W Cai, H Li, Z Zang - IEEE Electron Device Letters, 2021 - ieeexplore.ieee.org
In this letter, we report solution-processed, high-performance Indium-Zinc-Oxide (IZO) thin-
film transistors (TFTs). The annealing temperature of IZO films are studied and found that …

Low‐Temperature Atomic Layer Deposition of High‐k SbOx for Thin Film Transistors

J Yang, A Bahrami, X Ding, P Zhao… - Advanced Electronic …, 2022 - Wiley Online Library
SbOx thin films are deposited by atomic layer deposition (ALD) using SbCl5 and Sb (NMe2)
3 as antimony reactants and H2O and H2O2 as oxidizers at low temperatures. SbCl5 can …

Impact of ZrO2 Dielectrics Thickness on Electrical Performance of TiO2 Thin Film Transistors with Sub-2 V Operation

J Zhang, M Jia, MG Sales, Y Zhao, G Lin… - ACS Applied …, 2021 - ACS Publications
In the present work, the impact of ZrO2 gate dielectric thickness on the electrical
performance of TiO2 thin film transistors (TFTs) is systematically investigated. Exhaustive …

Contact resistance reduction of low temperature atomic layer deposition ZnO thin film transistor using Ar plasma surface treatment

J Lu, W Wang, J Liang, J Lan, L Lin… - IEEE Electron …, 2022 - ieeexplore.ieee.org
In this work, the effect of Ar plasma at the S/D contact in a low temperature (200°) fabricated
ALD ZnO thin-film transistors (TFTs) for contact resistance reduction is systematically …