Absorption spectroscopy gas sensor using a low-cost quartz crystal tuning fork with an ultrathin iron doped cobaltous oxide coating
S Zhou, L Xu, K Chen, L Zhang, B Yu, T Jiang… - Sensors and Actuators B …, 2021 - Elsevier
A proof-of-concept photoelectric detector is proposed for use in low-cost, compact, and
highly sensitive gas sensors. This detector is based on a quartz crystal tuning fork (QCTF) …
highly sensitive gas sensors. This detector is based on a quartz crystal tuning fork (QCTF) …
Laser induced chemical etching of quartz for MEMS sensors fabrication
M Sirota, B Lipavsky, D Nuttman… - … on Inertial Sensors …, 2023 - ieeexplore.ieee.org
We report on a novel Laser-Induced Chemical Etching technology for fabrication of
functional crystalline quartz MEMS resonant sensors. The suggested lithography-free …
functional crystalline quartz MEMS resonant sensors. The suggested lithography-free …
Flip chip bonding of a quartz MEMS-based vibrating beam accelerometer
J Liang, L Zhang, L Wang, Y Dong, T Ueda - Sensors, 2015 - mdpi.com
In this study, a novel method to assemble a micro-accelerometer by a flip chip bonding
technique is proposed and demonstrated. Both the main two parts of the accelerometer, a …
technique is proposed and demonstrated. Both the main two parts of the accelerometer, a …
[HTML][HTML] 微机械谐振式加速度计的研究现状及发展趋势
高杨， 雷强， 赵俊武， 吕军光 - 强激光与粒子束, 2017 - cpsjournals.cn
微机械谐振式加速度计(MMRA) 是通过检测加速度施加前后谐振器谐振频率变化实现对加速度
检测的. 该传感器具有频率信号输出, 稳定性好, 灵敏度高, 精度高等优点, 己成为MEMS …
检测的. 该传感器具有频率信号输出, 稳定性好, 灵敏度高, 精度高等优点, 己成为MEMS …
[PDF][PDF] Design and Fabrication of Quartz MEMS-based Monolithic Vibrating Beam Accelerometer.
J Liang, Q Tang, S Lin - Sensors & Materials, 2021 - sensors.myu-group.co.jp
We present a novel monolithic quartz vibrating beam accelerometer (QVBA), which is mainly
composed of a single-beam resonator, a base-proof mass structure, and a vibration isolation …
composed of a single-beam resonator, a base-proof mass structure, and a vibration isolation …
[HTML][HTML] Design and fabrication of a novel all-quartz resonant pressure sensor with continuously variable section of DETF
D Han, S Yuan, C Feng, T Yang, J Yang - AIP Advances, 2024 - pubs.aip.org
This paper reports a novel piezoelectric quartz crystal pressure sensor with a double-ended
tuning fork (DETF) resonator. The key design is the resonator beams with a continuously …
tuning fork (DETF) resonator. The key design is the resonator beams with a continuously …
A novel resonant accelerometer based on quartz on silicon (QoS)
C Han, Y Zhao, C Li - 2019 IEEE International Symposium on …, 2019 - ieeexplore.ieee.org
A novel way to fabricate quartz resonant accelerometer is proposed in this paper, which
mainly includes Quartz on Silicon (QoS) technology and Inductively Coupled Plasma (ICP) …
mainly includes Quartz on Silicon (QoS) technology and Inductively Coupled Plasma (ICP) …
Electrochemical etching of lightweight nanotips for high quality‐factor quartz tuning fork force sensor: atomic force microscopy applications
D Hussain, J Song, H Zhang, X Meng… - Micro & Nano …, 2018 - Wiley Online Library
Commercially available quartz tuning forks (QTFs) can be transformed into self‐sensing and
actuating force sensors by micro‐assembling a sharp tip on the apex of a tine. Mass of the …
actuating force sensors by micro‐assembling a sharp tip on the apex of a tine. Mass of the …