BornAgain is a free and open-source multi-platform software framework for simulating and
fitting X-ray and neutron reflectometry, off-specular scattering, and grazing-incidence small …

Numerical optimization is an important tool in the field of computational physics in general
and in nano-optics in specific. It has attracted attention with the increase in complexity of …

Methods and systems for performing measurements of semiconductor structures based on
high-brightness, polychromatic, reflective small angle x-ray scatterometry (RSAXS) …

Modern semiconductor structures reach sizes in the nanometer regime. Optical metrology
characterizes test structures for the quality assessment of semiconductor fabrication. The …

The geometry of a Si3N4 lamellar grating was investigated experimentally with reference-
free grazing-incidence X-ray fluorescence analysis. While simple layered systems are …

Periodic nanostructures are fundamental elements in optical instrumentation as well as
basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity …

Grazing-incidence small-angle X-ray scattering (GI-SAXS) is a promising technique for
investigating nanostructured surfaces, particularly for the fine pitch calibration of one …

Parameter reconstructions are indispensable in metrology. Here, the objective is to explain
K experimental measurements by fitting to them a parameterized model of the measurement …

Scan-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is an established
technique for the investigation of the elemental depth-profiles of various samples. Recently it …

Increasing miniaturization and complexity of nanostructures require innovative metrology
solutions with high throughput that can assess complex 3D structures in a non-destructive …