A systematic review of reliability issues in RF-MEMS switches

MM Saleem, H Nawaz - Micro and Nanosystems, 2019 - ingentaconnect.com
The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …

Design and simulation of a wide-range variable MEMS capacitor using electrostatic and piezoelectric actuators

B Sotoudeh, S Afrang, S Ghasemi, OR Afrang - Microsystem Technologies, 2023 - Springer
In this paper, we present a new structure of a micromachined tunable capacitor using a
combination of piezoelectric and electrostatic parallel-plate actuators. Electrostatic parallel …

Power efficient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications

H Mirzajani, AK Ilkhechi, P Zolfaghari… - Microelectronics …, 2017 - Elsevier
We present a new ultra-high isolation RF MEMS latching switch with ultra-low power
consumption dedicated to antenna switch applications in multiband and multi-standard …

Q-Factor Performance of 28 nm-Node High-K Gate Dielectric under DPN Treatment at Different Annealing Temperatures

CW Chen, SJ Wang, WC Hsieh, JM Chen, T Jong… - Electronics, 2020 - mdpi.com
Q-factor is a reasonable index to investigate the integrity of circuits or devices in terms of
their energy or charge storage capabilities. We use this figure of merit to explore the …

On the implementation of adaptive sliding mode robust controller in the stabilization of electrically actuated micro-tunable capacitor

H Mobki, AM Sabegh, A Azizi, HM Ouakad - Microsystem Technologies, 2020 - Springer
Parallel-plates based micro-tunable capacitors are known to have low travel ranges, which
deteriorate as going even lower in terms of their initials gap sizes. Such conditions have put …

A new electrostatically actuated rotary three-state DC-contact RF MEMS switch for antenna switch applications

A Kashani Ilkhechi, H Mirzajani… - Microsystem …, 2017 - Springer
In this paper, we present a novel laterally actuated DC-contact three-state RF MEMS switch.
Rotary electrostatic comb-drive actuators which can be rotated both clockwise and anti …

A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications

P Zolfaghari, V Arzhang, M Zolfaghari - Microsystem Technologies, 2018 - Springer
A novel laterally and micro-electro-thermally actuated RF MEMS switch is presented in this
paper. Despite many RF MEMS switches requiring continuous actuation voltage to hold the …

A novel SPDT rotary RF MEMS switch for low loss and power efficient signal routing

A Kashani Ilkhechi, H Mirzajani… - IETE Journal of …, 2016 - Taylor & Francis
In this paper, a new low loss with port-to-port high isolation electro-thermally actuated single-
pole double-throw (SPDT) radio frequency microelectromechanical systems switch with a …

Design and simulation of a novel RF-MEMS tunable narrow band LC filter in the UHF band

M Khodapanahandeh, A Babaeihaselghobi… - Microsystem …, 2021 - Springer
The design and simulation of a continuously tunable LC filter by integration of
microelectromechanical systems (MEMS) is presented in this work. The proposed tunable …

AC electrothermal actuation mechanism for on-chip mixing of high ionic strength fluids

M Ghandchi, RH Vafaie - Microsystem Technologies, 2017 - Springer
The ability to maintain a relative low temperature rise, portability and also achieve fast
mixing process is major advantage for high ionic strength processing, where high …