With Industry 4.0 becoming increasingly pervasive, the importance and usage of sensors
has increased several folds. Industry 4.0 refers to a new phase in the industrial revolution …

Micro-hotplate gas sensors are widely used in air quality monitoring, identification of
hazardous chemicals, human health monitoring, and other fields due to their advantages of …

This paper introduces a chip-level oven-controlled system for improving the temperature
stability of MEMS resonators wherein we designed the resonator and the micro-hotplate …

In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the
gas-sensitive material is deposited or coated on a metallic signal electrode and must be …

The growing applications and constant miniaturization of electronic devices and of low‐
temperature co‐fired ceramics (LTCC) in various fields, such as aviation …

Based on the problem where the intensity of an excitation source is not easy to regulate
using the traditional active control method, this paper presents an accurate temperature …

This paper presents design, fabrication and characterization of novel inter-layer
microheaters based on low temperature co-fired ceramics (LTCC) technology. LTCC …

The investigation is focused on the parametric evaluation of a microfabricated multilayer
planar (MLP) coil exposed to high temperature (HT)(\ge 600° C). It can potentially be used …

In this paper, thick film-based IR source is fabricated using multilayer Low Temperature Co-
fired Ceramic (LTCC) Technology. The proposed emitter is developed using screen printing …

In the present work, a tin oxide (SnO 2)-based gas sensor has been fabricated on Low
Temperature Co-fired Ceramic (LTCC) substrate by screen printing method for detection of …