The helium ion microscope has emerged as a multifaceted instrument enabling a broad
range of applications beyond imaging in which the finely focused helium ion beam is used …

The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …

Nanofabrication research pursues the miniaturization of patterned feature size. In the current
state of the art, micron scale areas can be patterned with features down to~ 30 nm pitch …

A gas‐assisted focused‐helium‐ion beam‐induced etching (FIBIE) process is introduced,
which accelerates direct‐write patterning of WSe2 relative to standard ion milling. The …

Abstract Systems with a focused ion beam, using gas field ion sources, are described. The
principles of operation and ways of formation of these sources, in which the effective …

A focused helium ion beam was used to introduce nano-sized gap chains in graphene. The
effect of beam scanning strategies in the fabrication of the nano-gap chains was …

In this paper we demonstrate a nanofabrication technique based on local ion irradiation of
silicon dioxide with a focused helium ion beam. The wet etching of silicon dioxide irradiated …

In this work, different regions of a graphene device were exposed to a 30 keV helium ion
beam creating a series of alternating strips of vacancy-type defects and pristine graphene …

(English) Graphene has revolutionized the field of condensed matter physics over the last
two decades, emerging as an outstanding research platform. This is because graphene …

Описаны системы со сфокусированным ионным пучком, использующие газовые
автоионные источники. В историческом контексте рассмотрены принципы работы …