Microfabricated impedance cytometers have been developed to measure the electrical
impedance of single biological particles at high speed. A general approach to analytically …

The dynamics of the out-of-plane comb-drive actuator used in a torsional resonant mode
microscanner is discussed. The microscanner is fabricated using the standard SOI …

Analysis of the movement of particles in a nonuniform field requires accurate knowledge of
the electric field distribution in the system. This paper describes a method for analytically …

To analyze and design the detecting structure of electrostatic inductive electric field sensors,
it is crucial to determine the capacitance. This study proposes a model for the theoretical …

Designing micro-accelerometers requires the calculation of their capacitance. An analytical
method based on the Schwarz–Christoffel mapping is proposed for the calculation of the …

Conformal mapping is an important mathematical tool that can be used to solve various
physical and engineering problems in many fields, including electrostatics, fluid mechanics …

Die vorliegende Arbeit befasst sich mit der Methode der modalen Superposition als
Ordnungsreduktionsverfahren in der Mikrosystemtechnik. Typische Anwendungsgebiete …

Designing a comb-actuator requires calculating electrostatic force. In this paper, the
analytical and high accurate formula of electrostatic force for comb-actuators with ground …

While surface capacitance is utilized widely for sensing and actuation in miniaturized
systems, relatively little attention has been paid to its enhancement using engineered …

The influence of perforation on the electrostatic force for thick micro-electromechanical
(MEMS) structures is analyzed theoretically and experimentally. A three-dimensional …