Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various
merits, such as low power consumption, being lightweight, having a small volume, accurate …

We present a review on the state of knowledge of surface phenomena behind adhesion in
surface micromechanical structures. After introducing the problem of release-related and in …

It may be argued that silicon, carbon, hydrogen, oxygen, and iron are among the most
important elements on our planet, because of their involvement in geological, biol-ical, and …

This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution
within this field, serving as a reference for the novice and the expert alike. Two parts divide …

Surface micromachining is characterized by the fabrication of micromechanical structures
from deposited thin films. Originally employed for integrated circuits, films composed of …

This thesis describes a general system simulation of microelectromechanical systems
(MEMS) based on lumped-parameter modeling. First-order analytic models are derived for …

Because of the low dimensional power of its force scaling law, surface tension is appropriate
for carrying out reshaping and assembly in the microstructure size domain. This paper …

Integrated sensors and actuators are rapidly evolving to provide an important link between
very large scale integrated circuits and nonelectronic monitoring and control applications …

Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as
they offer many advantages such as high-temperature resistance, high wear resistance, low …

Surface micromachining has enabled the cofabrication of thin-film micromechanical
structures and CMOS or bipolar/MOS integrated circuits. Using linear, single-axis …