MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

The ability to measure tiny variations in the local gravitational acceleration allows, besides
other applications, the detection of hidden hydrocarbon reserves, magma build-up before …

A sensitive micromachined resonant accelerometer that exhibits extremely low noise floor
and excellent bias stability is presented for future application of moving-base gravimetry. An …

The recent development of Micro-Electro-Mechanical System (MEMS) technology has
provided new methods for researchers to design and fabricate seismometers and …

Commercially available gravimeters and seismometers can be used for measuring Earth's
acceleration at resolution levels in the order of ng∕ Hz (where g represents earth's gravity) …

Micromachined resonant accelerometers (MRAs), especially those devices fabricated by
silicon on glass technology, suffer from temperature drift error caused by inherent thermal …

The measurement of tiny variations in local gravity enables the observation of subterranean
features. Gravimeters have historically been extremely expensive instruments, but usable …

Ice-covered ocean worlds possess diverse energy sources and associated mechanisms that
are capable of driving significant seismic activity, but to date no measurements of their …

Optical sensing techniques are well-known for electromagnetic immunity and thus have
been widely considered in high-performance vibration sensors such as accelerometers and …