Atomic-scale etching mechanism of aluminum with fluorine-based plasma
A Asaduzzaman - The Journal of Physical Chemistry C, 2022 - ACS Publications
A first-principles density functional theory study has been carried out to investigate the
etching and corrosion of aluminum with fluorine-based plasma. Aluminum is modeled with …
etching and corrosion of aluminum with fluorine-based plasma. Aluminum is modeled with …
Patterning of burnishing head for hard disk platters by synchrotron radiation lithography
K Leksakul, C Maneekat, R Phatthanakun - Microsystem technologies, 2014 - Springer
This paper discusses the patterning of the burnishing head for hard disk platters on the
AlTiC substrate, performed by X-ray exposure through X-ray mask to identify areas still left …
AlTiC substrate, performed by X-ray exposure through X-ray mask to identify areas still left …
Patterning of burnishing head using SU-8 hard mask fabricated by deep X-ray lithography
C Maneekat, R Phatthanakun… - 2012 9th …, 2012 - ieeexplore.ieee.org
This paper studies on the application of X-ray irradiation from synchrotron light for
burnishing head patterning. Feasibility study of SU-8 negative photoresist for AlTiC hard …
burnishing head patterning. Feasibility study of SU-8 negative photoresist for AlTiC hard …