Varifocal MEMS mirrors for high-speed axial focus scanning: a review
Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …
Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration
SJ Lukes, RD Downey, ST Kreitinger… - Applied …, 2016 - opg.optica.org
Electrostatically actuated deformable mirrors with four concentric annular electrodes can
exert independent control over defocus as well as primary, secondary, and tertiary spherical …
exert independent control over defocus as well as primary, secondary, and tertiary spherical …
MEMS-in-the-lens 3D beam scanner for in vivo microscopy
DL Dickensheets, T Liu… - MOEMS and …, 2019 - spiedigitallibrary.org
The “MEMS-in-the-lens” active lens for a laser scanning microscope comprises a high
numerical aperture front element, a 3D+ MOEMS beam scanner and a collimating back lens …
numerical aperture front element, a 3D+ MOEMS beam scanner and a collimating back lens …