Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

P Ashtijoo, S Bhattacherjee, R Sutarto, Y Hu… - Surface and Coatings …, 2016 - Elsevier
This work aims to develop novel techniques, including low energy end-hall ion (EDH)
source, nitrogen and silicon doping, to enhance the adhesion strength of Diamond-like …