[HTML][HTML] A review on autoencoder based representation learning for fault detection and diagnosis in industrial processes
Process monitoring technologies play a key role in maintaining the steady state of industrial
processes. However, with the increasing complexity of modern industrial processes …
processes. However, with the increasing complexity of modern industrial processes …
Use of optical emission spectroscopy data for fault detection of mass flow controller in plasma etch equipment
H Kwon, SJ Hong - Electronics, 2022 - mdpi.com
To minimize wafer yield losses by misprocessing during semiconductor manufacturing,
faster and more accurate fault detection during the plasma process are desired to increase …
faster and more accurate fault detection during the plasma process are desired to increase …
Failure detection and primary cause identification of multivariate time series data in semiconductor equipment
M Baek, SB Kim - IEEE Access, 2023 - ieeexplore.ieee.org
Downtime caused by equipment failure is the biggest productivity problem in the 24-hour a
day operations of the semiconductor industry. Although some equipment failures are …
day operations of the semiconductor industry. Although some equipment failures are …
Data-driven plasma modelling: surrogate collisional radiative models of fluorocarbon plasmas from deep generative autoencoders
GA Daly, JE Fieldsend, G Hassall… - … Learning: Science and …, 2023 - iopscience.iop.org
We have developed a deep generative model that can produce accurate optical emission
spectra and colour images of an ICP plasma using only the applied coil power, electrode …
spectra and colour images of an ICP plasma using only the applied coil power, electrode …
The survey of industrial anomaly detection for industry 5.0
L Wen, Y Zhang, W Hu, X Li - International Journal of Computer …, 2024 - Taylor & Francis
With the impetus of Industry 5.0, smart manufacturing would witness the significant
advancement of automation and digital transformation. Even though Deep Learning (DL) …
advancement of automation and digital transformation. Even though Deep Learning (DL) …
Comparative Analysis of Machine Learning Models for Predictive Analysis of Machine Failures
RG Baldovino, KSI Camacho… - 2024 9th …, 2024 - ieeexplore.ieee.org
As we enter what most call the fourth industrial revolution, technological advancements have
been made in terms of how equipment has been maintained. Predictive maintenance is a …
been made in terms of how equipment has been maintained. Predictive maintenance is a …
Latent Space Models of Plasmas: Virtual Metrology and Surrogate Plasma Models with Deep Generative Models
G Daly - 2023 - search.proquest.com
Semiconductors are a fundamentally important part of modern society and semiconductor
manufacturing is a key industry around the world. Plasma etching and deposition are the …
manufacturing is a key industry around the world. Plasma etching and deposition are the …
[PDF][PDF] Big Data Analysis for Fault Detection in Microprocessors Production
TDD Di Ricerca, STM Tutor, D Vinciguerra - iris.unict.it
This dissertation collects all the research work done by the PhD candidate at the Catania
site of STMicroelectronics. The research has been aimed at solving some practical issues …
site of STMicroelectronics. The research has been aimed at solving some practical issues …
Analisi dei Big Data per il rilevamento dei guasti nella produzione dei microprocessori
LC Viagrande - 2021 - tesidottorato.depositolegale.it
This dissertation collects all the research work done by the PhD candidate at the Catania
site of STMicroelectronics. The research has been aimed at solving some practical issues …
site of STMicroelectronics. The research has been aimed at solving some practical issues …