Atomic layer deposition of ZnO: a review

T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

AJM Mackus, JR Schneider, C MacIsaac… - Chemistry of …, 2018 - ACS Publications
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Homoepitaxial growth of β‐Ga2O3 layers by metal‐organic vapor phase epitaxy

G Wagner, M Baldini, D Gogova… - … status solidi (a), 2014 - Wiley Online Library
Epitaxial β‐Ga2O3 layers have been grown on β‐Ga2O3 (100) substrates using metal‐
organic vapor phase epitaxy. Trimethylgallium and pure oxygen or water were used as …

New efficient solar cell structures based on zinc oxide nanorods

R Pietruszka, BS Witkowski, S Gieraltowska… - Solar Energy Materials …, 2015 - Elsevier
In this paper, cheap and efficient photovoltaic cells based on ZnO/Si heterostructure are
discussed. These cells contain zinc oxide nanorods (ZnO NR) grown by a low temperature …

Selective Fluoride Transport in Subnanometer TiO2 Pores

X Zhou, M Heiranian, M Yang, R Epsztein, K Gong… - ACS …, 2021 - ACS Publications
Synthesizing nanopores which mimic the functionality of ion-selective biological channels
has been a challenging yet promising approach to advance technologies for precise ion–ion …

Surface Modification of Plastics: Atomic Layer Deposition

KS Johansson - Applied Plastics Engineering Handbook, 2024 - Elsevier
As devices are scaled down to the nanometer regime, the need for excellent conformality
and atomic thickness controllability becomes immense. Because of the recent …

Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures

M Vähä-Nissi, M Pitkänen, E Salo, E Kenttä… - Thin Solid Films, 2014 - Elsevier
Concerns on food safety, and need for high quality and extended shelf-life of packaged
foods have promoted the development of antibacterial barrier packaging materials. Few …

Core–shell-structured nanothermites synthesized by atomic layer deposition

L Qin, T Gong, H Hao, K Wang, H Feng - Journal of nanoparticle research, 2013 - Springer
Thermite materials feature very exothermic solid-state redox reactions. However, the energy
release rates of traditional thermite mixtures are limited by the reactant diffusion velocities. In …

Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition

T Tynell, H Yamauchi, M Karppinen - Journal of Vacuum Science & …, 2014 - pubs.aip.org
A combination of the atomic layer deposition (ALD) and molecular layer deposition (MLD)
techniques is successfully employed to fabricate thin films incorporating superlattice …

Impact of charge-trap layer conductivity control on device performances of top-gate memory thin-film transistors using IGZO channel and ZnO charge-trap layer

JY Bak, MK Ryu, SHK Park, CS Hwang… - IEEE Transactions on …, 2014 - ieeexplore.ieee.org
A top-gate-structured charge-trap-type memory thin-film transistors (CTM-TFTs) using In-Ga–
Zn-O (IGZO) channel and ZnO charge-trap layers were proposed to investigate effects of …