The technological field of surface acoustic wave (SAW) devices has progressed rapidly. The
fundamental Rayleigh mode has been mainly used in SAW applications, while the …

AlN and AlScN thin films with 27% scandium (Sc) were synthesized by DC magnetron
sputtering deposition and used to fabricate surface acoustic wave (SAW) devices …

In this paper, an AlN/free-standing nanocrystalline diamond (NCD) system is proposed in
order to process high frequency surface acoustic wave (SAW) resonators for sensing …

In this paper, we explore the acoustofluidic performance of zinc oxide (ZnO) thin-film surface
acoustic wave (SAW) devices fabricated on flexible and bendable thin aluminum (Al) …

This article is focused on the analysis of the electroacoustic response of surface acoustic
wave (SAW) filters made of aluminium nitride (AlN) thin films on various types of Si wafers …

Diamond films are very desirable for application to SAW devices because of their high
acoustic wave velocity, which allows the extending of the frequency limit of operation at a …

Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered
structures were fabricated by direct writing using e-beam lithography on the nucleation side …

Photoluminescence spectroscopy was employed to probe the nature of optical transitions
involving Al vacancy (V Al) and vacancy-oxygen complex (V Al-O N) in AlN. An emission line …

In combination with CVD diamond, an aluminium nitride (AlN) thin film is one of the most
promising piezoelectric materials for surface acoustic wave (SAW) applications. One of the …

We demonstrate coupled bulk and surface acoustic wave (BAW/SAW) resonators with
significantly improved coupling efficiency as compared to SAW only devices. Two sets of …