State of the art review on process, system, and operations control in modern manufacturing

D Djurdjanovic, L Mears… - Journal of …, 2018 - asmedigitalcollection.asme.org
Dramatic advancements and adoption of computing capabilities, communication
technologies, and advanced, pervasive sensing have impacted every aspect of modern …

A uniaxial testing approach for consistent failure in vascular tissues

C Sang, S Maiti, RN Fortunato… - Journal of …, 2018 - asmedigitalcollection.asme.org
Although uniaxial tensile testing is commonly used to evaluate failure properties of vascular
tissue, there is no established protocol for specimen shape or gripping method. Large …

[HTML][HTML] Canonical variable analysis and long short-term memory for fault diagnosis and performance estimation of a centrifugal compressor

X Li, F Duan, P Loukopoulos, I Bennett… - Control Engineering …, 2018 - Elsevier
Centrifugal compressors are widely used for gas lift, re-injection and transport in the oil and
gas industry. Critical compressors that compress flammable gases and operate at high …

Minimax optimization for recipe management in high-mixed semiconductor lithography process

M Khakifirooz, CF Chien, M Fathi… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
This article addresses the application of minimax optimization in the control design of
complex dynamic systems of the semiconductor manufacturing. We highlight the main …

Survey on run-to-run control algorithms in high-mix semiconductor manufacturing processes

F Tan, T Pan, Z Li, S Chen - IEEE Transactions on Industrial …, 2015 - ieeexplore.ieee.org
Recently, to ensure product quality in high-mix semiconductor manufacturing processes, run-
to-run (R2R) control algorithms have received increasing attention. Difficult challenges have …

A new double exponentially weighted moving average run-to-run control using a disturbance-accumulating strategy for mixed-product mode

SKS Fan, CH Jen, CY Hsu… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
Mixed-product production is common practice in semiconductor manufacturing and has
attracted considerable academic attention recently. The main purpose of the mixed-product …

Stability and performance analysis of time-delayed actuator control systems

B Ai, L Sentis, N Paine, S Han… - Journal of …, 2016 - asmedigitalcollection.asme.org
Time delay is a common phenomenon in robotic systems due to computational requirements
and communication properties between or within high-level and low-level controllers as well …

A New Deep Reinforcement Learning Run-to-Run Control Algorithm for Mixed-Product Production Mode in Semiconductor Manufacturing

SKS Fan, TJ Chen - IEEE Transactions on Automation Science …, 2025 - ieeexplore.ieee.org
This paper proposes a new Run-to-Run (R2R) control framework based on deep
deterministic policy gradient (DDPG) for the mixed-product production mode in …

Model quality evaluation in semiconductor manufacturing process with EWMA run-to-run control

Y Zheng, D Ling, YW Wang, SS Jang… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
Exponentially weighted moving average run-to-run (EWMA-RtR) controller is frequently
adopted in semiconductor manufacturing process. As a model-based control method, the …

Modeling and analysis of nonlinear wave propagation in one-dimensional phononic structures

M Liu, WD Zhu - Journal of Vibration and Acoustics, 2018 - asmedigitalcollection.asme.org
Different from elastic waves in linear periodic structures, those in phononic crystals (PCs)
with nonlinear properties can exhibit more interesting phenomena. Linear dispersion …