[HTML][HTML] A review of piezoelectric MEMS sensors and actuators for gas detection application

SS Ba Hashwan, MHM Khir, IM Nawi, MR Ahmad… - Discover Nano, 2023 - Springer
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …

MEMS-based piezoresistive and capacitive microphones: A review on materials and methods

A Kumar, A Varghese, D Kalra, A Raunak… - Materials Science in …, 2024 - Elsevier
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS2 Atomic Flakes

Y Yang, J Sun, W Cai, Z Liu, C Dejous… - Advanced Functional …, 2023 - Wiley Online Library
Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators
(FBARs) are facing an insurmountable challenge for millimetric frequency applications due …

FEM modelling and performance evaluation of a flexible film bulk acoustic resonator

AK Johar, JK Bhatt, YK Upadhyaya, A Tripathi… - Microsystem …, 2023 - Springer
In this article the F-FBAR device is designed by placing a piezoelectric material (PZT)
between two metal (Al) electrodes on the top of a Bragg's reflector structure (Bragg's reflector …

Tunable atmospheric microplasma synthesis of nitrogen-doped zinc oxide and titanium dioxide nanostructures

W Clower, M Pozniak, J Cutrera, K Seetala… - Nano-Structures & Nano …, 2022 - Elsevier
In this work, a parameter tunable microplasma synthesis method operating under
atmospheric conditions is presented. By adjustment of the liquid electrode composition …

[PDF][PDF] Discover Nano

SSB Hashwan, MHM Khir, IM Nawi, MR Ahmad… - 2023 - academia.edu
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …