Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones have gained significant attention due to their miniaturization, high performance, and diverse …
Y Yang, J Sun, W Cai, Z Liu, C Dejous… - Advanced Functional …, 2023 - Wiley Online Library
Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due …
In this article the F-FBAR device is designed by placing a piezoelectric material (PZT) between two metal (Al) electrodes on the top of a Bragg's reflector structure (Bragg's reflector …
W Clower, M Pozniak, J Cutrera, K Seetala… - Nano-Structures & Nano …, 2022 - Elsevier
In this work, a parameter tunable microplasma synthesis method operating under atmospheric conditions is presented. By adjustment of the liquid electrode composition …
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …