摘要对于步进扫描投影光刻机, 掩模台和工件台的同步伺服性能将直接影响整机技术指标.
掩模台和工件台是典型的六自由度超精密运动台, 在耦合动力学, 复杂内外部干扰条件下兼顾高 …

摘要光刻机是支撑集成电路芯片制程不断减小的关键设备, 而高性能的光刻机需要高加速度和高
精度的运动台作为支撑. 为了达到光刻机的各项工作指标, 高性能的运动台控制方法必不可少 …

A heterodyne grating interferometer (HTGI) able to simultaneously measure the three-axis
translational displacements of ultraprecision motion stages with a subnanometer resolution …

Technology in a broad sense is driven by developments in semiconductor technology,
particularly with respect to the computational power of devices and systems, as well as …

Fault diagnosis systems are essential in precision mechatronics to facilitate maintenance
and to minimize downtime. The aim of this paper is to describe the current trend in control for …

Machine learning techniques, including Gaussian processes (GPs), are expected to play a
significant role in meeting speed, accuracy, and functionality requirements in future data …

Increasingly stringent performance requirements for motion systems necessitate explicit
control of the flexible dynamic behavior. The aim of this paper is to present an approach to …

When identifying electrical, mechanical, or biological systems, parametric continuous-time
identification methods can lead to interpretable and parsimonious models when the model …

Next-generation deformable mirrors are envisaged to exhibit low-frequency flexible
dynamics and to contain a large number of spatially distributed actuators due to increasingly …

We present a framework that allows designing point-to-point closed-form trajectories and
identifying flexible modes, jointly. The impulse response of a k-cascaded second-order …