The significant advancements within the electronics miniaturization field have shifted the
scientific interest towards a new class of precision devices, namely microelectromechanical …

Microelectromechanical systems (MEMS) are a technology that allows engineers to create
small, integrated devices with electrical and mechanical components to perform tasks …

Dew point sensors are widely used in various fields to provide accurate data of absolute
humidity. In this paper, the dew point sensors based on MEMS piezoelectric circular …

This study investigates a two-temperature hygrothermoelastic model to describe the effects
of coupled temperature and moisture in a non-simple nano-beam subjected to hygrothermal …

In this paper, the effect of relative humidity of moist air is discussed on the quality factor (Q
factor) of micro-electro-mechanical systems (MEMS) cantilever resonators in wide range of …

The accurate measurement of humidity necessitates a dependable dew point sensor, with
the dew point identification approach being a crucial factor in its overall performance …

The interactions between temperature and moisture's impacts on structural instability are
relatively significant in environments with high heat and humidity levels. This study uses a …

Shape memory alloy (SMA) films are very attractive materials for microactuators because of
their high energy density. However, all currently developed SMA actuators utilize martensitic …

This paper investigates the compound effect of shear and squeeze energy dissipation
mechanisms for a silicon lateral micro-resonator with complex geometry in different …

In heat and moisture environments, the coupling effects of temperature and moisture on the
vibration of structures play a significant role. In this paper, a coupled hygrothermoelastic …