This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This review provides a summary of work on the resonant nonlinear dynamics of micro-and
nanoelectromechanical systems. This research area, which has been active for …

In order to compensate for the loss of performance when scaling resonant sensors down to
NEMS, it proves extremely useful to study the behavior of resonators up to very high …

Large-amplitude non-linear vibrations of micro-and nano-electromechanical resonant
sensors around their primary resonance are investigated. A comprehensive multiphysics …

We report the experimental observation of a four-bifurcation-point (or five possible
amplitudes for a given frequency) behavior of electrostatically actuated micromechanical …

This article reports a novel method to reduce the electrostatic and capacitive nonlinearities
in a disk resonator gyroscope (DRG) and to further improve its ultimate oscillation amplitude …

This paper reports on the first demonstration of multifrequency (176-, 222-, 307-, and 482-
MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical …

Electrostatic micromechanical actuators have numerous applications in science and
technology. In many applications, they are operated in a narrow frequency range close to …

This review provides a summary of the work completed to date on the nonlinear dynamics of
resonant micro-and nanoelectromechanical systems (MEMS/NEMS). This research area …

In doubly clamped curved mechanical beams, there are inherent hardening and softening
nonlinearities. Thus, their frequency of oscillation is a non-monotonic function of the energy …