Three-dimensional memory device with discrete self-aligned charge storage elements and method of making thereof

M Tsutsumi, K Kajiwara, RS Makala - US Patent 9,991,277, 2018 - Google Patents
A memory opening can be formed through an alternating stack of insulating layers and
sacrificial material layers over a substrate. A material layer stack containing, from outside to …

Three dimensional memory device with epitaxial semiconductor pedestal for peripheral transistors

K Miyata, Z Lu, A Lin, D Mao, J Yu, J Alsmeier… - US Patent …, 2016 - Google Patents
2016-01-13 Assigned to SANDISK TECHNOLOGIES INC. reassignment SANDISK
TECHNOLOGIES INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR …

Method of making a vertical NAND device using sequential etching of multilayer stacks

RS Makala, YS Lee, J Pachamuthu, J Alsmeier… - US Patent …, 2015 - Google Patents
2013-07-02 Assigned to SanDisk Technologies, Inc. reassignment SanDisk Technologies,
Inc. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS) …

Three-dimensional memory device containing bonded memory die and peripheral logic die and method of making thereof

A Nishida - US Patent 10,283,493, 2019 - Google Patents
A first die includes a three-dimensional memory device and first copper pads. A second die
includes a peripheral logic circuitry containing CMOS devices located on the semiconductor …

Ultrahigh density monolithic, three dimensional vertical NAND memory device

J Alsmeier, G Samachisa - US Patent 8,349,681, 2013 - Google Patents
Monolithic, three dimensional NAND strings include a semiconductor channel, at least one
end portion of the semiconductor channel extending substantially perpendicular to a major …

Three-dimensional memory device having support-die-assisted source power distribution and method of making thereof

KH Kim, M Higashitani, F Toyama… - US Patent 10,510,738, 2019 - Google Patents
2019-01-15 Assigned to SANDISK TECHNOLOGIES LLC reassignment SANDISK
TECHNOLOGIES LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR …

Ultrahigh density vertical NAND memory device and method of making thereof

J Alsmeier, VR Purayath, H Chien, G Matamis… - US Patent …, 2012 - Google Patents
A method of making a monolithic three dimensional NAND string. The method includes
forming a stack of alternating layers of a first material and a second material over a …

Single-semiconductor-layer channel in a memory opening for a three-dimensional non-volatile memory device

P Rabkin, J Pachamuthu, J Alsmeier - US Patent 9,230,980, 2016 - Google Patents
A memory film layer is formed in a memory opening through an alternating stack of first
material layers and second material layers. A sacrificial material layer is deposited on the …

Three dimensional NAND memory

N Mokhlesi, R Scheuerlein - US Patent 7,848,145, 2010 - Google Patents
(57) ABSTRACT A monolithic, three dimensional NAND string includes a first memory cell
located over a second memory cell, a select transistor, a first word line of the first memory …

Compact three dimensional vertical NAND and method of making thereof

J Alsmeier, RS Makala, X Costa, Y Zhang - US Patent 8,878,278, 2014 - Google Patents
A NAND device has at least a 3× 3 array of vertical NAND strings in which the control gate
electrodes are continuous in the array and do not have an air gap or a dielectric filled trench …