Wireless communication has led to an explosive growth of emerging consumer and military
applications of radio frequency (RF), microwave and millimeter wave circuits and systems …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

In this paper, we report the first fully-differential, electrostatically transduced RF MEMS
resonator. The fully-differential electrode configuration not only cancels capacitive …

In this paper, the performance of 6.35 MHz Lamé-mode square resonators with different
dimensions of straight-beam anchor supports is presented, with quality factor values …

In this paper, we report a 6.3 MHz Lamé-mode square resonator with fully differential drive
and sense electronics, exhibiting quality factor, Q values exceeding 1 million in ambient …

This paper describes a digitally programmable single-chip feedback ASIC for MEMS-
referenced oscillators in the 0.4-15-MHz range. The chip contains a differential-difference …

A fully differential CMOS-MEMS oxide resonator fabricated using 0.18 μm CMOS-MEMS
platform via metal wet-etching post process has been demonstrated with Q>; 10,000, first …

We here present an equivalent circuit model capable of capturing the effects of nonlinearity
in micromechanical resonators, particularly those driven and sensed by capacitive …

This paper reports the parallel internal electrostatic transduction of a laterally driven Lame-
mode polysilicon resonator. This resonator is fabricated using a manufacturable double …

This paper reports the parallel internal electrostatic transduction of a laterally driven Lamé-
mode polysilicon resonator. The transducer is fabricated using a manufacturable double …