Facing the energy consumption of a huge number of distributed wireless Internet of Things
(IoT) sensor nodes, scavenging energy from the ambient environment to power these …

This work introduces a system formed by an integrated circuit (IC) and a micromachined
piezoresistive gyroscope, with navigation grade performance. After discussing the …

Fabrication, characterization, and thermomechanical reliability of electroplated Cu-Sn-Cu-
based transient liquid phase (TLP) bonding required in microsystems packaging are …

This study reports a closed-loop system (CLS) for resonant micro-electromechanical
systems (MEMS) sensors subject to blue-sideband excitation (BSE) for the first time …

We propose and examine a potential analogy between mass transfer (in space) and energy
transfer (in solids). We adapt classical equations of matter dynamics to describe the …

Axi-symmetry micro gyroscopes are increasingly popular for their ultrahigh measurement
sensitivity. However, a side effect is the bias repeatability problem. In this article, we propose …

Lower stiffness can improve the performance of capacitive-based microelectromechanical
systems sensors. In this paper, softened beams, achieved by the electrostatic assembly …

This work advances the research on continuous mode-reversal frequency modulated
accelerometers by characterizing in depth some of their nonidealities, proposing methods …

This paper investigates changes of zero-rate offset of triaxial, consumer-grade MEMS
gyroscopes across temperature. Forty LGA mold-packaged prototype devices were …

A quadruple mass Coriolis vibratory gyroscope operating in the mode-matched condition
has been redesigned with the singular focus of minimizing nonlinear transduction …