3-D integration and through-silicon vias in MEMS and microsensors

Z Wang - Journal of Microelectromechanical Systems, 2015 - ieeexplore.ieee.org
After two decades of intensive development, 3-D integration has proven invaluable for
allowing integrated circuits to adhere to Moore's Law without needing to continuously shrink …

Advanced 3D Through-Si-Via and Solder Bumping Technology: A Review

YJ Jang, A Sharma, JP Jung - Materials, 2023 - mdpi.com
Three-dimensional (3D) packaging using through-Si-via (TSV) is a key technique for
achieving high-density integration, high-speed connectivity, and for downsizing of electronic …

Microsystems using three-dimensional integration and TSV technologies: Fundamentals and applications

Z Wang - Microelectronic Engineering, 2019 - Elsevier
As a powerful enabling technology, three-dimensional (3D) integration, which uses wafer
bonding to integrate multiple wafers in the vertical direction and uses through‑silicon-vias …

An effective approach of reducing the keep-out-zone induced by coaxial through-silicon-via

F Wang, Z Zhu, Y Yang, X Yin, X Liu… - IEEE Transactions on …, 2014 - ieeexplore.ieee.org
Keep-out-zone (KOZ) is a conservative way to prevent any devices/cells from being
impacted by the through-silicon via (TSV)-induced stress. In this paper, an effective …

Wideband electromagnetic modeling of coaxial-annular through-silicon vias

Q Lu, Z Zhu, Y Liu, X Liu, X Yin - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
A wideband equivalent-circuit model of coaxialannular through-silicon vias (TSVs) for three-
dimensional (3-D) integrated circuits is proposed in this paper. Rigorous closed-form …

High-frequency electrical model of through-silicon vias for 3-D integrated circuits considering eddy current and proximity effects

Q Lu, Z Zhu, Y Yang, R Ding, Y Li - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
A novel π-type equivalent-circuit model of through-silicon vias (TSVs) for 3-D integrated
circuits (3-D'Cs) considering eddy current and proximity effects is proposed in this paper …

A model of air-gap through-silicon vias (TSVs) for microwave applications

X Liu, Z Zhu, Y Yang, R Ding - IEEE Microwave and Wireless …, 2015 - ieeexplore.ieee.org
In this letter, Ground-Signal-Ground type through-silicon vias (TSVs) are designed to
achieve millimeter wave applications in three-dimensional integrated circuits (3-D ICs). Air …

Study on transmission characteristics of carbon nanotube through silicon via interconnect

L Qian, Z Zhu, Y Xia - IEEE Microwave and Wireless …, 2014 - ieeexplore.ieee.org
In this letter, the Resistance Inductance Capacitance Conductance (RLCG) parameters of
carbon nanotube through silicon via (CNT-TSV) are modeled and a transmission line (TL) …

Analysis of Transmission Characteristics of Copper/Carbon Nanotube Composite Through‐Silicon Via Interconnects

K Fu, J Zheng, WS Zhao, Y Hu… - Chinese Journal of …, 2019 - Wiley Online Library
We investigated the transmission characteristics of Cu/CNT composite Through‐silicon via
(TSV) interconnects. The equivalent lumped‐element circuit model was established, with the …

Low-loss air-cavity through-silicon vias (TSVs) for high speed three-dimensional integrated circuits (3-D ICs)

X Liu, Z Zhu, Y Yang, R Ding - IEEE Microwave and Wireless …, 2016 - ieeexplore.ieee.org
Since the coupling loss of conventional low resistivity silicon (LRSi) is considerable in high
speed three-dimensional integrated circuits (3-D ICs), air-cavity through-silicon vias (TSVs) …